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Search Publications

NIST Authors in Bold

Displaying 1626 - 1650 of 1909

Form of Deprotection in Chemically Amplified Resists

September 1, 2003
Author(s)
Ronald L. Jones, T J. Hu, Vivek M. Prabhu, Christopher L. Soles, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, M Angelopoulos
The push to mass production of patterns with sub-100 nm dimensions will require nanometer level control of feature size, including line edge roughness (LER). Control of LER and sidewall roughness within the length scale of individual molecules requires a

High-Throughput Measurements of Polymer Adhesion and Mechanical Properties

September 1, 2003
Author(s)
Christopher Stafford, Aaron M. Forster, C Harrison, Cher H. Davis, Eric J. Amis, Alamgir Karim
Polymer adhesion is important to numerous technologies including electronic packaging, coatings and paints, biomedical implants, and pressure-sensitive adhesives. The challenge is to understand the fundamental driving forces for the development of adhesive

High-Throughput Milli-Fluidic Platform for Polymer Formulations

September 1, 2003
Author(s)
Kathryn L. Beers, J Cabral, H J. Walls, Alamgir Karim, Eric J. Amis, C Harrison
Rapid prototyping of microfluidic handling devices has gained in popularity due to the ability to quickly test and modify new design features several times in one day.8-13 While elastomer-based methods have dominated the literature and are remarkably well

Interdiffusion in Polystyrene and End-Functional Polystyrene Thin Films Near a Solid Surface

September 1, 2003
Author(s)
C M. Wang, Vivek Prabhu, Christopher Soles, B D. Vogt, Wen-Li Wu, Eric K. Lin, Sushil K. Satija
Polymer interdiffusion near the polymer/solid interface is studied using neutron reflectometry. Bilayers of hydrogenated polystyrene (hPS) and deuterated polystyrene (dPS) or hydrogenated dicarboxy terminated polystyrene (hPS(COOH)2) and dPS are prepared

MALDI-TOF MS Characterization of Covalent Cationized Polyethylene

August 1, 2003
Author(s)
Sheng Lin-Gibson, D L. Brunner, David L. VanderHart, Barry J. Bauer, B M. Fanconi, Kathleen M. Flynn, William E. Wallace
MALDI-TOF MS generally uses metal salts to cationize synthetic polymers, such as polystyrene. However, reduced analyte signal often results from complications during the metal ionization processes in the gas phase including competition between the analyte

Polyelectrolyte Effects in Model Photoresist Developer Solutions

August 1, 2003
Author(s)
Vivek M. Prabhu, Ronald L. Jones, Eric K. Lin, Wen-Li Wu
We demonstrate that the industrially relevant deprotected photoresist poly(4-hydroxy styrene) is a polyelectrolyte when dissolved in aqueous base solutions. These findings demonstrate the well-known monomer-monomer correlations indicative of

Combinatorial Edge Delamination Test for Thin Film Adhesion Concept, Procedure, Results

July 1, 2003
Author(s)
Martin Y. Chiang, J He, R Song, Alamgir Karim, Wen-Li Wu, Eric J. Amis
A high-throughput combinatorial approach to edge delamination test is proposed to map the failure of adhesion as a function of both temperature and film thickness in a single step. In this approach, a single specimen of a thin film bonded to a substrate

MALDI-TOF Mass Spectral Characterization of Covalently-Cationized Polystyrene

July 1, 2003
Author(s)
Sheng Lin-Gibson, S Bencherif, Kathryn Beers, H M. Byrd
Bromine terminated, controlled molecular mass polystyrene with narrow polydispersity (Mn 40 000 g/mol, PD = 1.08) was prepared by atom transfer radical polymerization. The bromine end group was subsequently substituted with a phosphonium salt. We report

Resonant Soft X-Ray Photofragmentation of Propane

July 1, 2003
Author(s)
William E. Wallace, Daniel A. Fischer
A comparison was made between the mass spectra of propane (CH6d3^CH 2CH 3) for resonant soft X-ray photofragmentation and electron-impact ionization. The soft X-ray photon energy was tuned to 287.7 eV to promote Auger relaxations from the C-H bonds (1s _>

Deprotection Volume Characteristics and Line Edge Morphology in Chemically Amplified Resists

June 1, 2003
Author(s)
Ronald L. Jones, C G. Willson, T J. Hu, Vivek M. Prabhu, Christopher L. Soles, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, M Angelopoulos, B C. Trinque
The focus of this paper is the form of spatial heterogeneity of deprotection at the eventual pattern edge. The form results from the packing of fuzzy blobs consisting of volumes of deprotection created by individual photogenerated acids. The form and size

Monitoring Polymer/Clay Nanocomposites Compounding Using a Dielectric Slit Die

May 30, 2003
Author(s)
Anthony J. Bur, S C. Roth, M M. McBrearty
A new in-line process monitoring instrument, a dielectric slit die, was used to examine compounding of polymer/clay nanocomposites. It is a multi-purpose sensing device for measuring polymer dielectric, rheological and optical properties during extrusion

Numerical Analysis of a Coaxial Line With a Complex Gap Capacitance

May 1, 2003
Author(s)
Jan Obrzut, O Anopchenko
A full wave numerical analysis was performed for a coaxial line terminated by a complex gap capacitance. The scattering parameters, input impedance and the spatial distribution of the electromagnetic field have been obtained in the frequency range of 100

Ultrafast Dynamics of Gold-Based Nanocomposite Materials

May 1, 2003
Author(s)
Joseph S. Melinger, V D. Kleiman, D McMorrow, Franziska Grohn, Barry J. Bauer, Eric J. Amis
The ultrafast electron dynamics are investigated for small ((2.5 4.0) nm average diameter) Au nanoparticles contained in two different types of organic-inorganic nanocomposites. In one case, an aqueous solution contains Au nanoparticles embedded inside

High-Throughput Investigation of Cell Proliferation on Crystalline Polymers

April 1, 2003
Author(s)
N. R. Washburn, S B. Kennedy, Carl Simon Jr., K Yamada, Eric J. Amis
The results of our investigation of cell proliferation on crystalline polymers will be presented. The goal of the research is to investigate how cells respond to nanometer scale roughness, and crystallizing poly(L-lactic acid) (PLLA) was a convenient

Reference Material 8457, Ultra High Molecular Weight Polyethylene 0.5 cm Cubes

April 1, 2003
Author(s)
B M. Fanconi, John A. Tesk, William F. Guthrie
The geometric and surface features of a new NIST reference material, RM 8457 are presented. This reference material is composed of Ultra High Molecular Weight Polyethylene (UHMWPE) in the form of 5 mm cubes. These cubesare intended for use in swelling

The Bromine Doping of Polyacetylene

April 1, 2003
Author(s)
C. K. Chiang
The first doping experiment of polyacetylene performed by Chiang and Shirakawa in 1976 is described. The first successful doping experiment of polyacetylene impacted physics and chemistry in three aspects: 1) discovery of metallic conducting synthetic

Chemically Amplified Resist Fundamentals Studies by Combinatorial approaches

March 1, 2003
Author(s)
M Wang, Vivek Prabhu, Eric K. Lin, Michael J. Fasolka, Alamgir Karim
Sub-100 nm lithography requires more understanding of photoresist material properties and processing conditions to achieve necessary critical dimension control of patterned structures. As resist thickness and feature linewidth decrease, fundamental
Displaying 1626 - 1650 of 1909
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