Determination of Pore Size Distributions in Nanoporous Low-K Thin Films From Small Angle Neutron Scattering

Published

April 1, 2003

Author(s)

Barry J. Bauer, R C. Hedden, Hae-Jeong Lee, Christopher L. Soles, Da-Wei Liu

Abstract

Small angle neutron and x-ray scattering (SANS, SAXS) are powerful tools in determination of the pore size and content of nano-porous materials with low dielectric constants (low-k) that are being developed as interlevel dielectrics. Several models have been previously applied to fit the scattering data in order to extract information on the average pore and/or matrix size. A new method has been developed to provide information on the size distributions of the pore and matrix phases based on the chord length distribution introduced by Tchoubar and Mering. Examples are given of scattering from samples that have size distributions that are narrower and broader than the random distribution typical of scattering described by Debye, Anderson, and Brumberger. An example of fitting SANS data to a phase size distribution is given.

Proceedings Title

Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics | 2003 |

Volume

766

Conference Dates

April 21-25, 2003

Conference Title

Materials Research Society Symposium Proceedings

Pub Type

Conferences

Keywords

chord size, high concentration, pore, scattering, two-phase

Citation

Bauer, B. , Hedden, R. , Lee, H. , Soles, C. and Liu, D. (2003), Determination of Pore Size Distributions in Nanoporous Low-K Thin Films From Small Angle Neutron Scattering, Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics | 2003 | (Accessed October 18, 2025)