@conference{109586,
  author = {Barry Bauer and R Hedden and Hae-Jeong Lee and Christopher Soles and Da-Wei Liu},
  title = {Determination of Pore Size Distributions in Nanoporous Low-K Thin Films From Small Angle Neutron Scattering},
  year = {2003},
  number = {766},
  month = {2003-04-01},
  publisher = {Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics | 2003 |},
  language = {en},
}