Wang, M.
, Prabhu, V.
, Lin, E.
, Fasolka, M.
and Karim, A.
(2003),
Chemically Amplified Resist Fundamentals Studies by Combinatorial approaches, Polymeric Materials: Science & Engineering, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852278
(Accessed November 2, 2024)