@article{797111,
  author = {M Wang and Vivek Prabhu and Eric Lin and Michael Fasolka and Alamgir Karim},
  title = {Chemically Amplified Resist Fundamentals Studies by Combinatorial approaches},
  year = {2003},
  number = {90},
  month = {2003-03-01 00:03:00},
  publisher = {Polymeric Materials: Science & Engineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852278},
  language = {en},
}