TY  - JOUR
AU  - M Wang
AU  - Vivek Prabhu
AU  - Eric Lin
AU  - Michael Fasolka
AU  - Alamgir Karim
C2  - Polymeric Materials: Science & Engineering
DA  - 2003-03-01 00:03:00
LA  - en
M1  - 90
PB  - Polymeric Materials: Science & Engineering
PY  - 2003
TI  - Chemically Amplified Resist Fundamentals Studies by Combinatorial approaches
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852278
ER  -