February 4, 2025
Author(s)
John Diulus, Carles Corbella Roca, Feng Yi, David LaVan, Berc Kalanyan, Mark McLean, Lakshmi Ravi Narayan, William Osborn, James Maslar, Andrei Kolmakov
… radicals generated by reactive cold plasmas, typical in plasma cleaning applications. The setup consists of a … thermal masses. By measuring the temperature increase in the active sensor, caused by radical surface recombination … ion or electron fluxes. The system was successfully tested in a hydrogen plasma environment, and key performance metrics …