June 25, 2012
Author(s)
Martin O. Sandberg, Jeffrey S. Kline, Martin P. Weides, David S. Wisbey, David P. Pappas
… were investigated: fluorine- and chlorine-based reactive ion etches and an argon-ion mill. At high microwave probe powers, the reactive etched resonators showed low internal loss, whereas the ion- milled samples showed dramatically higher loss. At …