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Displaying 901 - 925 of 940

Quantitative secondary ion mass spectrometry imaging of self-assembled monolayer films for electron beam dose mapping in the environmental scanning electron microscope

July 1, 1998
Author(s)
John G. Gillen, Scott A. Wight, David S. Bright, T M. Herne
Fluorinated alkanethiol self assembled monolayers (SAM) films immobilized on gold substrates have been used as electron-sensitive resists to map quantitatively the spatial distribution of the primary electron beam scattering in an environmental scanning

Atomic Hydrogen for the Formation of Abrupt Sb Doping Profiles in MBE-Grown Si

May 1, 1998
Author(s)
P E. Thompson, C Silvestre, M E. Twigg, G Jernigan, David S. Simons
Previously atomic hydrogen has been shown to be effective in reducing the segregation of Ge on Si[100] during solid source molecular beam epitaxygrowth. In this work we have investigated atomic hydrogen to determine if it is equally effective in reducing
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