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This report examines whether the Web Ontology Language 2 (OWL 2) is expressive enough for some common manufacturing examples involving relations between parts of composite or assembled objects (part-part relations). We specify the semantics of these
Jing Li, Yin-Lin Shen, Jaehwa Jeong, Fredric Scire, John A. Kramar
A compact, two-stage, vertical actuator with built-in sensors has been developed for the Molecular Measuring Machine (M3) and other potential precision instrumentation applications, such as scanning probe microscopy (SPM). In this article, we describe the
Error-motions of rotating axes are one of many sources of imprecision in machining. Accurate determination of axis of rotation error motions of the rotary axes has a direct influence on the accuracy of the finished part. International and U.S. national
Jun-Feng Song, Li Ma, Theodore V. Vorburger, Susan M. Ballou
In the ballistics measurements and correlations, optimum selection of c has particular importance for an unambiguous extraction of Individual Characteristics from the Class Characteristics . Poorly selected c might result in the Class Characteristics being
James E. Potzick, Ronald G. Dixson, Richard Quintanilha, Michael T. Stocker, Andras Vladar, Egbert Buhr, Bernd Bodermann, Wolfgang Hassler-Grohne, Harald Bosse, C.G. Frase
In preparation of the international Nano1 linewidth comparison on photomasks between 8 national metrology institutes, NIST and PTB have started a bilateral linewidth comparison in 2008, independent of and prior to the Nano1 comparison in order to test the
Ronald G. Dixson, James E. Potzick, Ndubuisi G. Orji
The National Institute of Standards and Technology (NIST) has had a robust program in photomask dimensional metrology since the late 70s when the late Diana Nyyssonen and coworkers developed the first chrome-on-glass (COG) Standard Reference Material (SRM)
Mahesh Mani, Albert W. Jones, Jun H. Shin, Ram D. Sriram
Rigid, supply-chain organizational structures are giving way to highly dynamic collaborative partnerships. These partnerships will develop rapidly by composing global manufacturing resources in response to open market opportunities; and, they will disband
Building a simulation model for any large complex sys-tem requires high expertise and effort. These requirements can be reduced through building generic simulation capability that includes artifacts for facilitating the development of the simulation model
Gordon A. Shaw, David J. Ross, Steven E. Fick, Wyatt N. Vreeland
We propose a new technique, contactless differential conductivity detection (CDCD,) to improve the detection limit of contactless conductivity detection for capillary and microchannel electrophoresis. By exploiting a 3-electrode differential configuration
Xiao Zhu, Dhananjay Anand, Sulaiman Hussain, Ya-Shian Li-Baboud, James Moyne
Realizing benefits from real-time process control requires in-situ monitoring of process environment, equipment, and the wafer to maximize opportunities for process improvement and minimizing effects of process deviations. The data gathered from the
The fundamental atomic physics of a gas laser transition is such that the transition frequency, or equivalently, the vacuum wavelength of the laser, cannot vary from its central value by more than a few parts in 106. The uncertainty of the gas laser
This paper presents an experimental investigation of the dynamics of a custom-designed spindle test system under different operation conditions and at various stages of its service life. Unlike classical modal analysis techniques where known input
James Moyne, Ya-Shian Li-Baboud, Xiao Zhu, Dhananjay Anand, Sulaiman Hussain
The ability to acquire quality equipment and process data is pertinent for future real-time process control systems to maximize opportunities for semiconductor manufacturing yield enhancement and equipment efficiency. Clock synchronization for accurate
Balasubramanian Muralikrishnan, Daniel S. Sawyer, Christopher J. Blackburn, Steven D. Phillips, Bruce R. Borchardt, William T. Estler
The American Society for Mechanical Engineers (ASME) recently released the ASME B89.4.19 Standard [1] on performance evaluation of spherical coordinate instruments such as laser trackers. At the National Institute of Standards and Technology (NIST), we can
Ronald G. Dixson, Ndubuisi G. Orji, B Bunday, J Allgair
As the size of integrated circuit features continues to decrease, the accuracy of measurements becomes more important. Due to greater emphasis on precision rather than accuracy, many of the measurements made in semiconductor fabs are not traceable to the
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing two-dimensional through-focus scanning optical microscope (TSOM) images constructed using a
In the uncertainty budget of Rockwell hardness tests, microform geometric errors of the diamond indenter are a major contributor. The microform calibration of Rockwell diamond indenters has been one of the key steps for Rockwell hardness standardization
Flash laser detection and ranging (LADAR) systems are increasingly used in robotics applications for autonomous navigation and obstacle avoidance. Their compact size, high frame rate, wide field of view, and low cost are key advantages over traditional
Yung-Tsun T. Lee, Frank H. Riddick, Charles R. McLean, Swee K. Leong
The Core Manufacturing Simulation Data (CMSD) specification, developed by researchers at the National Institute of Standards and Technology, provides neutral structures for the efficient exchange of manufacturing data in a simulation environment. The CMSD
Michael T. Postek, Andras Vladar, John A. Dagata, Natalia Farkas, Bin Ming, Ronald Sabo, Theodore H. Wegner
Biomass surrounds us from the smallest alga to the largest redwood tree. Even the largest trees owe their strength to a newly-appreciated class of nanomaterials known as cellulose nanocrystals (CNC). Cellulose, the world s most abundant natural, renewable
Nanometrology provides the means to measure and characterize nanometer scale process and product performance and covers an expanse of topics including instrumentation, measurement methods (off-line and in-process applications), and standards. To meet the
This document describes NIST's high pressure natural gas flow calibration service (NGFCS). Flow calibrations are conducted offsite at the Colorado Experimental Engineering Station Incorporated (CEESI) in Garner, Iowa. A parallel array of nine turbine meter
Petr Cizmar, Andras Vladar, Bin Ming, Michael T. Postek
Resolution is a key performance metric, which often defines the quality of a scanning electron microscope (SEM). Traditionally, there is the subjective measurement of the distance between two points on special ''resolution'' samples and there are several
Norman A. Sanford, F Brizuela, Kristine A. Bertness
Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short