Postek, M.
and Vladar, A.
(2008),
Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology, Scanning
(Accessed March 15, 2026)
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Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology
Published
Author(s)
,
Citation
Scanning
Volume
30
Pub Type
Journals
Keywords
Helium ion, HIM, microscopy, scanning electron microscope, SEM, nanomanufacturing, nanometrology
Citation
Issues
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Created November 4, 2008, Updated February 19, 2017