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Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology

Published

Author(s)

Michael T. Postek, Andras Vladar
Citation
Scanning
Volume
30

Keywords

Helium ion, HIM, microscopy, scanning electron microscope, SEM, nanomanufacturing, nanometrology

Citation

Postek, M. and Vladar, A. (2008), Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology, Scanning (Accessed June 22, 2024)

Issues

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Created November 4, 2008, Updated February 19, 2017