Postek, M.
and Vladar, A.
(2008),
Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology, Scanning
(Accessed August 30, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology
Published
Author(s)
,
Citation
Scanning
Volume
30
Pub Type
Journals
Keywords
Helium ion, HIM, microscopy, scanning electron microscope, SEM, nanomanufacturing, nanometrology
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created November 4, 2008, Updated February 19, 2017