TY  - JOUR
AU  - Michael Postek
AU  - Andras Vladar
C2  - Scanning
DA  - 2008-11-04
LA  - en
M1  - 30
PB  - Scanning
PY  - 2008
TI  - Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology
ER  -