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PUBLICATIONS

Computational Parameters in Simulation of Microscope Images

Published

Author(s)

Egon Marx, James E. Potzick

Abstract

The simulation of microscope images computed from scattered fields determined using integral equations depend on a number of parameters that are not related to the scatterer or to the microscope but are choices made for the computation method. The effect of different choices on the images and on the estimated line width are determined for two typical configurations.
Proceedings Title
PIERS Meeting
Volume
5
Issue
1
Conference Dates
March 23-27, 2009
Conference Location
Beijing
Pub Type
Conferences

Keywords

computational parameters, electromagnetic scattering, integral equations, lines and trenches in semiconductors, microscope images, two-dimensional scatterer
Manufacturing, Metrology and Optical physics and communications

Citation

Marx, E. and Potzick, J. (2008), Computational Parameters in Simulation of Microscope Images, PIERS Meeting, Beijing, -1 (Accessed October 11, 2025)

Issues

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Created November 28, 2008, Updated June 2, 2021
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