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Koo-hyun Chung, Antony Chen, Christopher Anderton, Kiran Bhadriraju, Anne L. Plant, Brian G. Bush, Robert F. Cook, Frank W. DelRio
Frictional properties of native and fibronectin (FN)-functionalized type I collagen (COL) thin films were studied via atomic force microscopy. The COL lateral contact stiffness was dependent only on the hydration state, indicating that shear deformation
Ari D. Feldman, Richard K. Ahrenkiel, John H. Lehman
High-injection mobility reduction is examined by theory, modeling, and experimental data acquired by resonance coupled photoconductive decay (RCPCD). The ambipolar mobility is shown to reduce to zero when the constituent injection-dependent carrier
Zakariae Chbili, Pragya R. Shrestha, Jason P. Campbell, John S. Suehle, Kin P. Cheung, D. E. Ioannou
In this paper we report an unexpected improvement in the SiC DMOSFET transistor characteristics after a long temperature treatment at 150 C. The evolution of the device characteristics during a TDDB stress is compared to that after an elevated temperature
Bryan M. Barnes, Jing Qin, Hui Zhou, Richard M. Silver
Recently, a new technique called Fourier normalization has enabled the parametric fitting of optical images with multiple or even a continuum of spatial frequencies. Integral to the performance of this methodology is the characterization of the high
Frank W. DelRio, Lawrence H. Friedman, Michael S. Gaither, William A. Osborn, Robert F. Cook
Roughness scaling of three different deep reactive ion etched (DRIE) silicon surfaces is investigated using atomic force microscopy. At small distances, height-height correlations H reveal power-law behavior with equal scaling exponents for all surfaces
Jing Qin, Richard M. Silver, Bryan M. Barnes, Hui Zhou, Francois R. Goasmat
There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer scale changes has been observed when measuring critical dimensions
Thao M. Nguyen, Julien C. Gigault, Vincent A. Hackley
The development of highly efficient asymmetric-flow field flow fractionation (A4F) methodology for biocompatible PEGylated gold nanorods (GNR) without the need for surfactants in the mobile phase is presented. We report on the potential of A4F for rapid
B. P. Geiser, Eric B. Steel, Karen T. Henry, D. Olson, T.J. Prosa
Atom probe tomography implant dose measurements are reported for National Institute of Standards and Technology Standard Reference Material 2134 (As implant). Efforts were taken to manufacture specimens with limited variation in size and shape to minimize
This study is focused on understanding the effect of thermal cycling on the signal integrity characteristics of TSV isolation liner (SiO2). The use of radio frequency (RF) signals is found to be a good metrology tool for the detection of discontinuities in
We present an approach for characterizing transistors embedded in microstrip lines formed on a thin bisbenzocyclobutene-based (BCB) monomers film at sub-millimeter-wave frequencies. We demonstrate the approach to 750 GHz and estimate the uncertainty of the
Dylan F. Williams, Phillip Corson, Sharma Jahnavi, Krishnaswamy Harish, Tai Wei, George Zacharias, Ricketts David, Watson Paul, Dacquay Eric, Voinigescu Sorin
We study and present design guidelines for thru-reflect-line vector-network-analyzer calibration kits used for characterizing circuits and transistors fabricated on silicon integrated circuits at millimeter-wave frequencies. We compare contact-pad designs
Bryan M. Barnes, Martin Y. Sohn, Francois R. Goasmat, Hui Zhou, Richard M. Silver, Abraham Arceo
Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.
The design and application of a novel solar simulator based on a high-power, super-continuum laser is described in this work. The simulator light was focused to a spot approximately 8 υm in diameter, and used to create micrometer-scale spatial maps of full