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Conferences

A Method to Characterize Overlay Tool Misalignments and Distortions

Author(s)
Richard M. Silver, James E. Potzick, Fredric Scire, Christopher J. Evans, Michael L. McGlauflin, Edward A. Kornegay, Robert D. Larrabee
A new optical alignment artifact under development at NIST is described. This structure, referred to as a stepped microcone, is designed to assist users and

Statistical Measure for the Sharpness of the SEM Image

Author(s)
Nien F. Zhang, Michael T. Postek, Robert D. Larrabee
Fully automated or semi-automated scanning electron microscopes (SEM) are now commonly used in semiconductor production and other forms of manufacturing

Measurement of Heat Conduction Through Stacked Screens

Author(s)
T Kuriyama, F Kuriyama, Michael A. Lewis, Ray Radebaugh
This paper describes the experimental apparatus for the measurement of heat conduction through stacked screens as well as some experimental results taken with

What Does it Take to Make Good Things Happen?

Author(s)
J E. Snell
The theme of this symposium is fire risk and hazard assessment research application. We tend to focus on the tools which in themselves are means to some end

Surveying Through Solid Walls

Author(s)
William C. Stone
A good metrology system in the automated environment must (1) measure the three dimensional position and attitude of any component to a reasonable degree of

Evaluation of Seismic Performance Parameters

Author(s)
Hai S. Lew
Recent earthquakes have shown that buildings designed for life safety could sustain severe damage to structural and nonstructural elements and building contents
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