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Conferences

Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions

December 31, 1997

Author(s)

Joseph Kopanski, Jay F. Marchiando, David W. Berning

Reference-Length Shortening by Kelvin Voltage in Linewidth Test Structures Replicated in Mono-Crystalline Silicon Films

December 31, 1997

Author(s)

W. F. Lee, William F. Guthrie, Michael W. Cresswell, Richard A. Allen, J. J. Sniegowski, Loren W. Linholm

A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

December 31, 1997

Author(s)

Jay F. Marchiando, Joseph Kopanski, J R. Lowney

Implementation of Thermoelectric Microwave Power Sensors in CMOS Technology

December 31, 1997

Author(s)

V. Milanovic, Michael Gaitan, E. D. Bowen, N. H. Tea, Mona E. Zaghloul

Development of a High Flux Conduction Calibration Apparatus

December 31, 1997

Author(s)

William L. Grosshandler, David L. Blackburn

Buried Oxide Defects in Low Dose SIMOX: Processing Conditions, Precipitates and Defects, and Detection Methods

December 31, 1997

Author(s)

Peter Roitman, S. Bagchee, S. J. Krause, G. A. Garcia, P. J. McMarr, B. J. Mrstik, H. L. Hughes

Design and Fabrication of Micromachined Passive Microwave Filtering Elements in CMOS Technology

December 31, 1997

Author(s)

V. Milanovic, Michael Gaitan, E. D. Bowen, N. H. Tea, Mona E. Zaghloul

Issues in Validating Package Thermal Models for Natural Convection Cooled Electronic Systems

December 31, 1997

Author(s)

V. H. Adams, David L. Blackburn, Yogendra K. Joshi, David W. Berning

Package Geometry Considerations in Thermal Compact Modeling Strategies

December 31, 1997

Author(s)

V. H. Adams, Yogendra K. Joshi, David L. Blackburn

Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference Material Applications

December 31, 1997

Author(s)

Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A. Allen, William F. Guthrie, Loren W. Linholm

Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version

December 31, 1997

Author(s)

Joseph Kopanski, Jay F. Marchiando, R. Alvis

Thickness Determination of Ultra-Thin SiO₂ Films on Si by Spectroscopic Ellipsometry

December 31, 1997

Author(s)

Nhan Van Nguyen, Curt A. Richter

Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors

December 31, 1997

Author(s)

Joseph Kopanski, Jay F. Marchiando, J R. Lowney

Optimization of the Electrical Properties of Low-Dose SIMOX Wafers

December 31, 1997

Author(s)

P. J. McMarr, B. J. Mrstik, M. E. Twigg, H. L. Hughes, M. J. Anc, Peter Roitman, G. A. Garcia

Measurement Method and SRMs Impacting the Healthcare and Food Industries

December 16, 1997

Author(s)

Willie E. May

Proceedings

Technology Vision for the U.S. Chemical Industry in the 21st Century

December 16, 1997

Author(s)

Hratch G. Semerjian

A Global View of Chemical Metrology: Recent Developments and Basic Concepts

December 16, 1997

Author(s)

Hratch G. Semerjian

Reference Materials and Their Impact on World Trace

December 16, 1997

Author(s)

Willie E. May

Proceedings

Fire Suppression Efficiency Screening Method

December 3, 1997

Author(s)

Jiann C. Yang, Michelle K. Donnelly, William L. Grosshandler

Most of the current methods for fire suppression efficiency screening (e.g., cup burners) are designed for screening agents that can be delivered in the form of

The Use of Computer Simulations to Interpret and Understand Electrical Measurements

December 1, 1997

Author(s)

Edward J. Garboczi

It is very rare to obtain complete 3-D information in the form of images of the microstructure of a material. Most often this information is incomplete because

Improvements in Neutron Beam Applications by Using Capillary Optics

December 1, 1997

Author(s)

Robert G. Downing, Q F. Xiao, V. A. Sharov, I Y. Ponomarev, J B. Ullrich, D M. Gibson, H H. Chen-mayer, D F. Mildner, George P. Lamaze

The New NIST Low Frost-Point Humidity Generator

December 1, 1997

Author(s)

Gregory E. Scace, P H. Huang, Joseph T. Hodges, Douglas A. Olson, James R. Whetstone

Advances in Cryocoolers

December 1, 1997

Author(s)

Ray Radebaugh

NIST Standard Reference Materials for Use as Thermometric Fixed Points

December 1, 1997

Author(s)

Gregory F. Strouse, G T. Furukawa, Billy W. Mangum, E R. Pfeiffer

Chemical and Physical Influences of Halogenated Fire Suppressants

December 1, 1997

Author(s)

Valeri I. Babushok, T Noto, A Hamins, Wing Tsang

Series-Resistor Calibration

December 1, 1997

Author(s)

Dylan F. Williams, Dave K. Walker

We develop a coplanar-waveguide probe-tip scattering parameter calibration based on a thru, a reflect, and an accurately modeled Series resistor. Comparison to