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Anomalies in Shallow Depth Profiles of Boron in Silicon

Published

Author(s)

P Chi
Proceedings Title
Secondary Ion Mass Spectrometry SIMS XI
Volume
11
Conference Dates
September 7-12, 1997
Conference Location
Orlando, FL
Conference Title
11th International Conference on Secondary Ion Mass Spectrometry (SIMS XI)

Citation

Chi, P. (1998), Anomalies in Shallow Depth Profiles of Boron in Silicon, Secondary Ion Mass Spectrometry SIMS XI, Orlando, FL (Accessed July 20, 2024)

Issues

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Created February 1, 1998, Updated February 19, 2017