Chi, P.
(1998),
Anomalies in Shallow Depth Profiles of Boron in Silicon, Secondary Ion Mass Spectrometry SIMS XI, Orlando, FL
(Accessed November 29, 2023)
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Anomalies in Shallow Depth Profiles of Boron in Silicon
Published
Author(s)
Proceedings Title
Secondary Ion Mass Spectrometry SIMS XI
Volume
11
Conference Dates
September 7-12, 1997
Conference Location
Orlando, FL
Conference Title
11th International Conference on Secondary Ion Mass Spectrometry (SIMS XI)
Pub Type
Conferences
Citation
Created February 1, 1998, Updated February 19, 2017