NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Anomalies in Shallow Depth Profiles of Boron in Silicon

Published

Author(s)

P Chi
Proceedings Title
Secondary Ion Mass Spectrometry SIMS XI
Volume
11
Conference Dates
September 7-12, 1997
Conference Location
Orlando, FL
Conference Title
11th International Conference on Secondary Ion Mass Spectrometry (SIMS XI)
Pub Type
Conferences
Chemistry

Citation

Chi, P. (1998), Anomalies in Shallow Depth Profiles of Boron in Silicon, Secondary Ion Mass Spectrometry SIMS XI, Orlando, FL (Accessed October 11, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created February 1, 1998, Updated February 19, 2017
Was this page helpful?