TY  - CONF
AU  - P Chi
C2  - Secondary Ion Mass Spectrometry SIMS XI, Orlando, FL
DA  - 1998-02-01
LA  - en
M1  - 11
PB  - Secondary Ion Mass Spectrometry SIMS XI, Orlando, FL
PY  - 1998
TI  - Anomalies in Shallow Depth Profiles of Boron in Silicon
ER  -