Testing Displacement-Measuring Interferometer Systems

Published

January 1, 1998

Author(s)

Jack A. Stone Jr., Martin Schroeck, Michael T. Stocker

Abstract

We have made a study of one method for testing displacement-measuring interferometer systems, a modified back-to-back comparison, that automatically compensates for changes in the optical path length between the two interferometers.  Although this method has certain disadvantages relative to other possible approaches, the ultimate achievable accuracy is entirely satisfactory, and the method provides greater flexibility than do alternate approaches.  When testing interferometer systems we currently achieve a length-proportional expanded uncertainty (coverage factor k=2) of D1/1=1x10-7, where 1 is the measured displacement.  Although this uncertainty is sufficiently small to satisfy present commercial demands, it may be possible to further reduce the uncertainty with modest additional effort.

Proceedings Title

Proceedings of Measurements Science Conference

Conference Dates

February 1, 1998

Conference Location

Unknown, USA

Conference Title

Measurements Science Conference

Pub Type

Conferences

Keywords

interferometer calibration, interferometer comparisons, interferometry

Citation

Stone, J. , Schroeck, M. and Stocker, M. (1998), Testing Displacement-Measuring Interferometer Systems, Proceedings of Measurements Science Conference, Unknown, USA (Accessed June 4, 2023)