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Testing Displacement-Measuring Interferometer Systems

Published

Author(s)

Jack A. Stone Jr., Martin Schroeck, Michael T. Stocker

Abstract

We have made a study of one method for testing displacement-measuring interferometer systems, a modified back-to-back comparison, that automatically compensates for changes in the optical path length between the two interferometers.  Although this method has certain disadvantages relative to other possible approaches, the ultimate achievable accuracy is entirely satisfactory, and the method provides greater flexibility than do alternate approaches.  When testing interferometer systems we currently achieve a length-proportional expanded uncertainty (coverage factor k=2) of D1/1=1x10-7, where 1 is the measured displacement.  Although this uncertainty is sufficiently small to satisfy present commercial demands, it may be possible to further reduce the uncertainty with modest additional effort.
Proceedings Title
Proceedings of Measurements Science Conference
Conference Dates
February 1, 1998
Conference Location
Unknown, USA
Conference Title
Measurements Science Conference

Keywords

interferometer calibration, interferometer comparisons, interferometry

Citation

Stone, J. , Schroeck, M. and Stocker, M. (1998), Testing Displacement-Measuring Interferometer Systems, Proceedings of Measurements Science Conference, Unknown, USA (Accessed November 30, 2023)
Created January 1, 1998, Updated February 19, 2017