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Conferences

Characterization of On-Wafer Diode Noise Sources

June 1, 1998

Author(s)

James P. Randa, Dave K. Walker, Lawrence P. Dunleavy, Robert L. Billinger, John Rice

A set of wafer probeable diode noise source transfer standards are characterized using on-wafer noise temperature methods developed recently at the National...

Accuracy of Lumped-Element Calibrations for Four-Sampler Vector Network Analyzers

June 1, 1998

Author(s)

Roger Marks, Jeffrey A. Jargon, D. K. Rytting

Several lumped-element calibrations have been proposed for four-sampler vector network analyzers. This paper offers the first assessment of their accuracy in...

Development of a Molecular Dynamics Model of Thermal Reactivity in Polymers

June 1, 1998

Author(s)

Marc R. Nyden

Thermal reactivity is an important consideration that impacts the way polymers and the materials that are made from them are processed and used. This...

The Performance of Transit Time Flowmeters in Heated Gas Mixtures

June 1, 1998

Author(s)

John D. Wright

An ultrasonic transit time flowmeter was tested over Reynolds numbers from 1000 to 100,000 in a calibration facility that generates gas flows with controlled...

Determination of Hydrogen in Metals, Semiconductors, and Other Materials by Cold Neutron Prompt Gamma-Ray Activation Analysis

June 1, 1998

Author(s)

Rick L. Paul, Richard M. Lindstrom

Performance of Tape-Bonded Seams of EPDM Membranes: Factors Affecting the Creep-Rupture Response of Tape-Bonded and Liquid-Adhesive-Bonded Seams

June 1, 1998

Author(s)

Walter J. Rossiter Jr, M Vangel, K M. Kraft

A field investigation of tape-bonded seams of EPDM (ethylene propylene diene terpolymer) roof membranes is described. Since the early 1990s the use of tape...

Comparison of SOLR and TRL Calibrations

June 1, 1998

Author(s)

Dave K. Walker, Dylan F. Williams

We examine a short-open-load-reciprocal scattering parameter calibration in both in-line and orthogonal probe configurations. We explore its standard...

In-Line Multiport Calibration Algorithm

June 1, 1998

Author(s)

Dylan F. Williams, Dave K. Walker

We present a multiport measurement procedure well suited to on-wafer measurement. It can correct multiport measurements with any conventional in-line...

A Cryogenic Catheter for Treating Heart Arrhythmia

June 1, 1998

Author(s)

E D. Marquardt, Ray Radebaugh, J Dobak

Progress in the development of a cryogenic catheter to treat heart arrhythmia is discussed. This system uses a mixed-gas Joule-Thomson refrigerator to cool the...

Metrology: Impact on National Economy and International Trade

June 1, 1998

Author(s)

Hratch G. Semerjian, Robert L. Watters

The U.S. Federal Government has a strong role in metrology R&D in the U.S because of its importance to the nation's economy and the Constitutional authority...

Lumped-Element Impedance Standards

June 1, 1998

Author(s)

Dylan F. Williams, Dave K. Walker

We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard...

Accurate Characteristic Impedance Measurement on Silicon

June 1, 1998

Author(s)

Dylan F. Williams, Uwe Arz, Hartmut Grabinski

This paper presents a new method that accurately determines the characteristic impedance of planar transmission lines printed on lossy dielectrics even when...

Metal-Insulator-Semiconductor Transmission Line Model

June 1, 1998

Author(s)

Dylan F. Williams

This paper investigates the one-dimensional metal-insulator-semiconductor transmission line. It develops closed-form expressions for equivalent-circuit...

Optical computer aided tomography for plasma uniformity measurements

June 1, 1998

Author(s)

Eric C. Benck, J R. Roberts

Developing Usability Tools and Techniques for Designing and Testing Web Sites

June 1, 1998

Author(s)

Jean C. Scholtz, Sharon J. Laskowski, L L. Downey

Web sites are developed by a wide variety of companies from small one or two person operations to large corportions with entire teams and departments devoted to...

VRML Test Case Generation and Evaluation Using Java

June 1, 1998

Author(s)

Leonard E. Gebase, Mary C. Brady, Alden A. Dima, Lynne S. Rosenthal

A well-established approach to conformance testing is to treat the implementation being tested as a black box. With this approach, a reference implementation is...

Cyclopolymerizable Monomers for Use as Acrylic Biomaterials

June 1, 1998

Author(s)

John A. Tesk, J W. Stansbury, Alan S. Litsky

Despite their many advantageous characteristics and extensive use, mixtures of methyl methacrylate monomers (MMA) and poly methyl methacrylate powders have some...

X-Ray Transition Energies -- New Comprehensive Evaluation

June 1, 1998

Author(s)

R Deslattes, Ernest G. Kessler, Paul Indelicato, E Lindroth

In this brief report we describe some of the background for our continuing efforts toward a new comprehensive data base for x-ray transitions, and indicate the...

Effect of Regenerator Geometry on Pulse Tube Refrigerator Performance

June 1, 1998

Author(s)

Michael A. Lewis, T Kuriyama, J Xiao, Ray Radebaugh

This paper gives results of the cooling performance of a double-inlet pulse tube refrigerator using various redenerators. The same pulse tube was used for all...

Acoustic Methods for Transport Properties Measurements in Gases

June 1, 1998

Author(s)

Keith A. Gillis, J B. Mehl, Michael R. Moldover

Two novel acoustic resonators have been developed, one for measuring the viscosity and a second for measuring the Prandtl number of gases. For viscosity...

An Automated Apparatus for Measuring Sound Speeds in Hazardous Gases

June 1, 1998

Author(s)

John J. Hurly

Our laboratory has developed an automated apparatus for measuring the sound speed in hazardous gases such as those used in processing semiconductors. The sound...

Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope

June 1, 1998

Author(s)

Ronald G. Dixson, R Koning, Theodore V. Vorburger, Joseph Fu, V W. Tsai

Because atomic force microscopes (AFMs) are capable of generating three dimensional images with nanometer level resolution, these instruments are being...

Strategy for Faster Blind Reconstruction of Tip Geometry for Scanned Probe Microscopy

June 1, 1998

Author(s)

John S. Villarrubia

In scanned probe microscopy, it is necessary to know the tip's geometry in order to correct image distortions due to its finite size. Heretofore, methods have...

Accuracy and Traceability in Dimensional Measurements

June 1, 1998

Author(s)

James E. Potzick

Dimensional measurements of importance to microlithography include feature sizes and feature placement on photomasks and wafers, overlay eccentricities, defect...

High Energy X-Ray Diffraction Technique for Monitoring Solidification of Single Crystal Castings

June 1, 1998

Author(s)

D W. Fitting, W P. Dube, Thomas A. Siewert

We developed a noninvasive x-ray technique to monitor the solidification of single-crystal castings. X-ray energies in the 150 keV to 320 keV range have...

A Study of a Water-to-Water Heat Pump Using Flammable Refrigerants

June 1, 1998

Author(s)

William V. Payne, Piotr A. Domanski, J Muller

This investigation compared the performance of R22 to the performance of R290 and that of flammable zeotropic mixtures, R32/290 and R32/152a. The tests were...

Toward a Unified Advanced CD-SEM Specification for Sub 0.18 Micrometer Technology

June 1, 1998

Author(s)

J Allgair, C Archie, W Banke, H Bogardus, J Griffith, H Marchman, Michael T. Postek, L Saraf, J Schlesinger, B Singh, N. Sullivan, L Trimble, Andras Vladar, A Yanof

The stringent critical dimension (CD) control requirements in cutting edge device facilities have placed significant demands on metrologists and upon the tools...

Digital Recording and Analysis of Partial Discharges in Point-Dielectric Gaps

June 1, 1998

Author(s)

Yicheng Wang, X. Han, Richard J. Van Brunt, T. Las, H. Slowikowska, J. C. Horwath, D. L. Schweickart

Time-Base Nonlinearity Determination Using Iterated Sine-Fit Analysis

June 1, 1998

Author(s)

Gerard N. Stenbakken, J. P. Deyst

A new method is presented to determine the time-base errors of sampling instruments. The method does not require a model for the time-base error and, thus...

Evaluation of High-Voltage Impulse Waveforms Using Model-Based Deconvolution

June 1, 1998

Author(s)

Gerald FitzPatrick, Eric D. Simmon, J. Lagnese

Accurate measurement of high voltage (hv) impulse waveforms is of critical importance in the testing of hv apparatus and for fundamental insulation studies...

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