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Conferences

Toward a Unified Advanced CD-SEM Specification for Sub 0.18 Micrometer Technology

Author(s)
J Allgair, C Archie, W Banke, H Bogardus, J Griffith, H Marchman, Michael T. Postek, L Saraf, J Schlesinger, B Singh, N. Sullivan, L Trimble, Andras Vladar, A Yanof
The stringent critical dimension (CD) control requirements in cutting edge device facilities have placed significant demands on metrologists and upon the tools...

Optimizing GMR Spin Valves: The Outlook for Improved Properties

Author(s)
William F. Egelhoff Jr., P J. Chen, Cedric J. Powell, D Parks, Robert McMichael, J Judy, D Martien, A. E. Berkowitz, J M. Daughton
The current generation of giant magnetoresistance (GMR) spin valves exhibits performance characteristics which are not quite as good as desired for ultrahigh...

Stability of Multilayer Structures: Capillary Effects

Author(s)
Daniel Josell, W Carter, John E. Bonevich
The long term stability of multilayer materials composed of nonreactive, immiscible materials is related to the equilibrium shapes of the individual grains...

Quality Control Procedures for the NIST/EPA/NIH Mass Spectral Library

Author(s)
C L. Clifton, S G. Lias, Anzor I. Mikaia, O D. Sparkman, Stephen Stein, Dmitrii Tchekhovskoi, Damo Zhu, Vladimir G. Zaikin
The goal of quality control procedures is to produce the best possible spectra for library searching. The role of a panel of data evaluators is presented, and...

Software Testing: Protocol Comparison

Author(s)
James H. Yen, D L. Banks, Leonard J. Gallagher, Paul E. Black, Robert C. Hagwood, Raghu N. Kacker, Lynne S. Rosenthal
Software testing is hard, expensive, and uncertain. Many protocols have been suggested, especially in the area of conformance verification. In order to compare...

Completing Our Panel's Work.

Author(s)
Richard N. Wright
Our 30th Joint Meeting provides an opportunity to reflect on our work and accomplishments and establish our view for the future of our U.S./Japan Panel on Wind...
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