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Conferences

Embedded Systems, The Forgotten Y2K Problem

Author(s)
G E. Fisher
Much has been written about embedded systems and how they will be affected by the year 2000 problem. During the first 6 months of 1999, a significant amount of

Intercomparison of SEM, AFM, and Electrical Linewidths

Author(s)
John S. Villarrubia, Ronald G. Dixson, Samuel N. Jones, J R. Lowney, Michael T. Postek, Richard A. Allen, Michael W. Cresswell
Uncertainty in the locations of line edges dominates the uncertainty budget for high quality sub-micrometer linewidth measurements. For microscopic techniques

Toward Nanometer Accuracy Measurements

Author(s)
John A. Kramar, E Amatucci, David E. Gilsinn, Jay S. Jun, William B. Penzes, Fredric Scire, E C. Teague, John S. Villarrubia
We at NIST are building a metrology instrument called the Molecular Measuring Machine (MMM) with the goal of performing 2D point-to-point measurements with one

Two-Dimensional Calibration Artifact and Measurement Methodology

Author(s)
Richard M. Silver, Theodore D. Doiron, William B. Penzes, S Fox, Edward A. Kornegay, S Rathjen, M Takac, D Owen
In this paper, we describe our design and the manufacturing of a two-dimensional grid artifact of chrome on quartz on a 6 inch by 6 inch by .250 glass blank

Assessment Error Sources in Rockwell Hardness Measurements

Author(s)
Walter S. Liggett Jr, Samuel Low, David J. Pitchure, Jun-Feng Song
In the use of hardness test blocks, the uncertainty due to block non-uniformity can be reduced if one is willing to make measurements at specified locations on

Optical Linewidth Models: Then and Now

Author(s)
Robert D. Larrabee, Richard M. Silver, M P. Davidson
In the late 1970's, Dr. Diana Nyyssonen demonstrated that NIST could optically calibrate photomask linewidth standards that were narrower than the classical

Software to Optimize the Testing of Mixed-Signal Devices

Author(s)
Gerard N. Stenbakken, Andrew D. Koffman, T. M. Souders
New software is now available to help test and measurement engineers optimize the testing of complex electronic devices. Examples of products that are
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