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Measurement Uncertainity and Noise in Nanometrology

Published

Author(s)

James E. Potzick

Abstract

The measurement of feature sizes on integrated circuit photomasks and wafers is an economically important and technically challenging application of nanometrology. The displacement measuring laser heterodyne interferometer is a popular tool in such applications, but measurement errors which may be unimportant in other applications can become significant in measuring such small objects. Measurment uncertainty resulting from interferometer resolution and nonlinearity can be reduced by oversampling and averaging multiple measurements, but only if there is some noise on the measurand. In this paper the optimum noise level is determined and the consequent improvement in measurement uncertainty calculated.
Proceedings Title
Laser Metrology for Precision Measurement and Inspection in Industry
Conference Dates
October 13-15, 1999
Conference Location
Florianopolis, BR
Conference Title
International Symposium on Laser Metrology

Keywords

laser interferometer, measurement uncertainty, nanometrology, noise, quantization error

Citation

Potzick, J. (1999), Measurement Uncertainity and Noise in Nanometrology, Laser Metrology for Precision Measurement and Inspection in Industry, Florianopolis, BR (Accessed February 20, 2024)
Created June 1, 1999, Updated February 19, 2017