TY  - CONF
AU  - James Potzick
C2  - Laser Metrology for Precision Measurement and Inspection in Industry, Florianopolis, BR
DA  - 1999-06-01
LA  - en
PB  - Laser Metrology for Precision Measurement and Inspection in Industry, Florianopolis, BR
PY  - 1999
TI  - Measurement Uncertainity and Noise in Nanometrology
ER  -