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Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

Published

Author(s)

Jay F. Marchiando, Joseph Kopanski, John Albers
Proceedings Title
Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors
Conference Dates
March 28-31, 1999
Conference Location
Research Triangle Park, NC, USA

Citation

Marchiando, J. , Kopanski, J. and Albers, J. (1999), Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements, Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA (Accessed July 22, 2024)

Issues

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Created May 31, 1999, Updated October 12, 2021