TY - CONF AU - Jay Marchiando AU - Joseph Kopanski AU - John Albers C2 - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA DA - 1999-06-01 00:06:00 LA - en PB - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA PY - 1999 TI - Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements ER -