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Conferences

The Neolithography Consortium

June 1, 2000

Author(s)

James E. Potzick

The role of process simulation in microlithography is becoming an increasingly important part of process control as wafer feature sizes become smaller than the...

Accurate Dimensional Metrology With Atomic Force Microscopy

June 1, 2000

Author(s)

Ronald G. Dixson, R Koning, Joseph Fu, Theodore V. Vorburger, Thomas B. Renegar

Atomic force microscopes (AFMs) generate three dimensional images with nanometer level resolution and, consequently, are used in the semiconductor industry as...

Linewidth Measurement Intercomparison on a BESOI Sample

June 1, 2000

Author(s)

John S. Villarrubia, Andras Vladar, J R. Lowney, Michael T. Postek, Richard A. Allen, Michael W. Cresswell, Rathindra Ghoshtagore

The effect of the instrument on the measurement must be known in order to generate an accurate linewidth measurement. Although instrument models exist for a...

Traceability Calibration, & Measurement Uncertainty Issues Regarding Coordinate Measuring Machines and Other Complex Instruments

June 1, 2000

Author(s)

Steven D. Phillips

The modern definition of traceability intimately links the concepts of calibration (i.e., connection to the SI unit) and measurement uncertainty. In a typical...

Smart pyrometry for combined sample temperature and reflectance measurements in molecular beam epitaxy

June 1, 2000

Author(s)

Kristine A. Bertness

Improved sample temperature measurement accuracy is demonstrated in a normal-incidence optical reflectance spectroscopy system that has been modified to allow...

Effective Area and Nonlinear Coefficient Measurements of Single-Mode Fibers: Recent Interlaboratory Comparisons

June 1, 2000

Author(s)

Timothy J. Drapela

The National Institute of Standards and Technology (NIST) has recently administered two interlaboratory comparisons, coordinated within the Fiber Optics...

NFRad: Review of the New NIST Noise Measurement System

June 1, 2000

Author(s)

Chriss A. Grosvenor, James P. Randa, Robert L. Billinger

Micromachined Branch Line Coupler in CMOS Technology

June 1, 2000

Author(s)

Mehmet Ozgur, Ulas C. Kozat, Mona E. Zaghloul, Michael Gaitan

Recent Progress in Nanoscale Indentation of Polymers Using the AFM

June 1, 2000

Author(s)

Mark R. VanLandingham, John S. Villarrubia, G F. Meyers

Regardless of the type of test, reliable indentation measurements require knowledge of the shape of the indenter tip. For indentation measurements involving sub...

Coplanar-Waveguide-to-Microstrip Transition Model

June 1, 2000

Author(s)

Wojciech Wiatr, Dave K. Walker, Dylan Williams

We develop a novel four-port equivalent circuit for a coplanar-waveguide-to-microstrip transition using a finite-difference time-domain analysis. The lumped...

Analysis of Interconnection Networks and Mismatch in the Nose-to-Nose Calibration

June 1, 2000

Author(s)

Donald C. DeGroot, Paul D. Hale, M. Vanden Bossche, F. Verbeyst, Jan Verspecht

We analyze the input networks of the samplers used in the nose-to-nose calibration method. Our model demonstrates that the required input network conditions are...

Role of Crack Formation in the Electric Fatigue Behavior of Ferroelectric PZT Ceramics

June 1, 2000

Author(s)

D C. Lupascu, J Nuffer, Jay S. Wallace, J Rodel

The electric fatigue behavior of a commercial lead zirconate titanate (PZT) was investigated by optical microscopy and instrumented Hertzian microindentation...

Surface Morphology Variations in MALDI-TOF-Mass Spectrometry Samples Prepared by Various Techniques Examined by Scanning Electron Microscopy

June 1, 2000

Author(s)

William R. Blair, Charles M. Guttman, A A. Guiseppetti

Continuing interest at NIST (National Institute of Standards and Technology) in producing MALDI (Matrix Assisted Laser Desorption/Ionization) analyses with a...

Estimating the Magnitude and Phase Response of a 50 GHz Sampling Oscilloscope Using the Nose-to-Nose Method

June 1, 2000

Author(s)

Paul D. Hale, Tracy S. Clement, Kevin Coakley, Chih-Ming Wang, Donald C. DeGroot, A. P. Verdoni

We describe estimation of the magnitude and phase response of a sampling oscilloscope over 50 Ghz bandwidth using the nose-to-nose method. The measurements are...

A Phase-Field/Fluid Motion Model of Solidification: Investigation of Flow Effects During Directional Solidification and Dendritic Growth

June 1, 2000

Author(s)

D M. Anderson, William J. Boettinger, Geoffrey B. McFadden, A A. Wheeler

The phase-field model of diffusion-controlled solidification has recently been extended to include the effects of fluid flow in the melt. The phase-field model...

Workshop on Evaluating Collaborative Enterprises - Workshop Report

June 1, 2000

Author(s)

Robert Allen, Amy Knutilla, Michelle P. Steves

The workshop, Evaluating Collaborative Engerprises, explored the issues surrounding the evaluation of collaborative systems including methods and tools for...

Potentials of On-Line Scanning Electron Microscope Performance Analysis Using NIST Reference Material 8091

June 1, 2000

Author(s)

Michael T. Postek, Andras Vladar, Nien F. Zhang, Robert D. Larrabee

Fully automated scanning electron microscopes (SEM) are now commonly used in semiconductor production and other forms of manufacturing. Testing and proving that...

Is a Production-Level Scanning Electron Microscope Linewidth Standard Possible?

June 1, 2000

Author(s)

Michael T. Postek, Andras Vladar, John S. Villarrubia

Metrology will remain a principal enabler for the development and manufacture of future generations of semiconductor devices. With the potential of 130 and l00...

Thermal Modeling of Calorimeters for Excimer Lasers at 193 nm Wavelength

June 1, 2000

Author(s)

D X. Chen, Marla L. Dowell, Christopher L. Cromer, Nien F. Zhang

Narrow Photoluminescence Linewidths from Ensembles of Self-Assembled InGaAs Quantum Dots

June 1, 2000

Author(s)

Richard Mirin, Kevin L. Silverman, David H. Christensen

Self-assembled InGaAs quantum dots (QDs) have been intensely studied for the past several years because of the potential applications ranging from low threshold...

Comparison of Electrical CD Measurements and Cross-Section Lattice-Plane Counts of Sub-Micrometer Features Replicated in (100) Silicon-on-Insulator Material

June 1, 2000

Author(s)

Michael W. Cresswell, John E. Bonevich, T J. Headley, Richard A. Allen, Lucille A. Giannuzzi, Sarah C. Everist, Rathindra Ghoshtagore, Patrick J. Shea

Test structures of the type known as cross-bridge resistors have been patterned in (100) epitaxial silicon material that was seeded on Bonded and Etched-Back...

Effect of Resin Composition on the Remineralizing Ability of Amorphous Calcium Phosphate-Based Polymeric Composites

May 15, 2000

Author(s)

Drago Skrtic, Joseph M. Antonucci, E D. Eanes

Five photoactivated resins, designated BTHZ, TP, U0H, U66H and U132H, were evaluated for the effects of the chemical structure and compositional variations of...

Information Technology for Engineering and Manufacturing

May 10, 2000

Author(s)

Michael Gruninger, Barbara L. Goldstein, Kevin G. Brady, Simon Szykman, Charles R. McLean, Joshua Lubell

Advances in information technology are frequently cited as the basis for the continued growth of the U.S. economy. Manufacturers use information technology...

The NIST National Advanced Manufacturing Testbed: A Collaboratory for Manufacturing Research and Measurement Services

May 8, 2000

Author(s)

David C. Stieren

This paper describes the National Advanced Manufacturing Testbed (NAMT) at the National Institute of Standards and Technology (NIST). The NAMT is a distributed...

Superconducting Transition Edge Sensor Bolometer Arrays for Submillimeter Astronomy

May 3, 2000

Author(s)

D. J. Benford, C. A. Allen, A. S. Kutyrev, S. H. Mosely, Rick A. Shafer, James A. Chervenak, Erich N. Grossman, Kent D. Irwin, John M. Martinis, Carl D. Reintsema

Studies of astrophysical emission in the far-infrared and submillimeter will increasingly require large arrays of detectors containing hundreds to thousands of...

Performance Data on Cold Temperature Dispersion of CF3I

May 2, 2000

Author(s)

Jiann C. Yang, Thomas G. Cleary, Michelle K. Donnelly

Tritluoroiodomethane (CF3I) has been proposed as a potential replacement for Halon 1301 in aircraft engine nacelle and dry bay fire protection applications. The...

Parallel Maximum-Likelihood Inversion for Estimating Wavenumber-Ordered Spectra in Emission Spectroscopy

May 2, 2000

Author(s)

H El-Sayed, M Salit, J Travis, J E. Devaney, William L. George

We introduce a parallelization of the maximum-likelihood cosine transform.This transform consists of a computationally intensive iterative fittingprocess, but...

A Capacitance Standard Based on Counting Electrons: Progress Report

May 1, 2000

Author(s)

Mark W. Keller, Neil M. Zimmerman, Ali L. Eichenberger, John M. Martinis

We have built a prototype capacitance standard based on single-electron tunneling (SET) devices and a cryogenic vacuum-gap capacitor. We are currently involved...

Effective Fragment Potentials and the Enzyme Active Site

May 1, 2000

Author(s)

S E. Worthington, Morris Krauss

Optimization of the binding conformation of a substrate in an enzyme active site using ab initio quantum chemistry methods are intractable since the active site...

Fire Performance of High Strength Concrete: Research Needs

May 1, 2000

Author(s)

Long T. Phan, Nicholas J. Carino

A compilation of fire test data which shows distinct behaviroal differences between HSC and NSC at elevated temperature is presented. The differences are most...

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