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Characterization of Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards

Published

Author(s)

Michael W. Cresswell, Richard A. Allen, Rathindra Ghoshtagore, Nadine Guillaume, Patrick J. Shea, Sarah C. Everist, Loren W. Linholm
Proceedings Title
ICMTS Proceedings
Conference Dates
February 28-March 3, 2000
Conference Location
Santa Clara, CA, USA
Conference Title
Conference on Microelectronic Test Structures

Citation

Cresswell, M. , Allen, R. , Ghoshtagore, R. , Guillaume, N. , Shea, P. , Everist, S. and Linholm, L. (2000), Characterization of Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards, ICMTS Proceedings, Santa Clara, CA, USA (Accessed May 21, 2024)

Issues

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Created April 5, 2000, Updated October 12, 2021