Cresswell, M.
, Allen, R.
, Ghoshtagore, R.
, Guillaume, N.
, Shea, P.
, Everist, S.
and Linholm, L.
(2000),
Characterization of Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards, ICMTS Proceedings, Santa Clara, CA, USA
(Accessed December 3, 2024)