TY - CONF AU - Michael Cresswell AU - Richard Allen AU - Rathindra Ghoshtagore AU - Nadine Guillaume AU - Patrick Shea AU - Sarah Everist AU - Loren Linholm C2 - ICMTS Proceedings, Santa Clara, CA, USA DA - 2000-04-06 00:04:00 LA - en PB - ICMTS Proceedings, Santa Clara, CA, USA PY - 2000 TI - Characterization of Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards ER -