TY  - CONF
AU  - Michael Cresswell
AU  - Richard Allen
AU  - Rathindra Ghoshtagore
AU  - Nadine Guillaume
AU  - Patrick Shea
AU  - Sarah Everist
AU  - Loren Linholm
C2  - ICMTS Proceedings, Santa Clara, CA, USA
DA  - 2000-04-06 00:04:00
LA  - en
PB  - ICMTS Proceedings, Santa Clara, CA, USA
PY  - 2000
TI  - Characterization of Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards
ER  -