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Conferences

The NIST X-Ray Optics Calibration Interferometer (XCALIBIR)

Author(s)
Angela Davies, Christopher J. Evans, R Kestner, M Bremer
NIST's next generation interferometer (XCALIBIR) is a 300mm aperture, general-purpose interferometer designed to push the limits of optical testing. In this...

Characterization of Asymmetric Coupled CMOS Lines

Author(s)
Uwe Arz, Dylan F. Williams, Dave K. Walker, J. E. Rogers, M. Rudack, D. Treytner, Hartmut Grabinski
This paper investigates the properties of asymmetric coupled lines built in a 0.25 5m CMOS technology in the frequency range of 50 MHz to 26.5 GHz. We show that...

Intelligent Control for Unmanned Vehicles

Author(s)
Karl Murphy, Marilyn N. Abrams, Stephen B. Balakirsky, David Coombs, Tsai Hong Hong, Steven Legowik, Tommy Chang, Alberto Lacaze
Mobility, Unmanned Systems, Vision, Robotics & Intelligent Systems

Modeling of Stable and Unstable Polarization Switching

Author(s)
H Kessler, Lin-Sien H. Lum, H Balke
We examine the stability of polarization switching in polyscrystalline ferroelectric/ferroelastic materials subject to continuous electromechanical loading. In...

An XML Repository Architecture for STEP Modules

Author(s)
Joshua Lubell
NIST is developing a web-based repository to serve as the core of a modular environment for developers of STEP, a family of product data exchange standards...

The Neolithography Consortium

Author(s)
James E. Potzick
The role of process simulation in microlithography is becoming an increasingly important part of process control as wafer feature sizes become smaller than the...

Accurate Dimensional Metrology With Atomic Force Microscopy

Author(s)
Ronald G. Dixson, R Koning, Joseph Fu, Theodore V. Vorburger, Thomas B. Renegar
Atomic force microscopes (AFMs) generate three dimensional images with nanometer level resolution and, consequently, are used in the semiconductor industry as...

Linewidth Measurement Intercomparison on a BESOI Sample

Author(s)
John S. Villarrubia, Andras Vladar, J R. Lowney, Michael T. Postek, Richard A. Allen, Michael W. Cresswell, Rathindra Ghoshtagore
The effect of the instrument on the measurement must be known in order to generate an accurate linewidth measurement. Although instrument models exist for a...

Coplanar-Waveguide-to-Microstrip Transition Model

Author(s)
Wojciech Wiatr, Dave K. Walker, Dylan Williams
We develop a novel four-port equivalent circuit for a coplanar-waveguide-to-microstrip transition using a finite-difference time-domain analysis. The lumped...
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