Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Conferences

IPPS: An Integrated Process Planning System

Author(s)
Suber Huang, J Mei, Xuhang Tong, Steven R. Ray
The past two decades have witnessed the development of many CAPP (Computer-Aided Process Planning) systems. From variant process planning to generative process

High-Resolution Optical Overlay Metrology

Author(s)
Richard M. Silver, Ravikiran Attota, M R. Bishop, Jay S. Jun, Egon Marx, M P. Davidson, Robert D. Larrabee
Optical methods are often thought to lose their effectiveness as a metrology tool beyond the Rayleigh criterion. However, using advanced modeling methods, the

Evaluation of New In-Chip and Arrayed Line Overlay

Author(s)
Ravikiran Attota, Richard M. Silver, M R. Bishop, Egon Marx, Jay S. Jun, Michael T. Stocker, M P. Davidson, Robert D. Larrabee
Two types of overlay targets have been designed and evaluated for the study of optical overlay metrology. They are in-chip and arrayed overlay targets. In-chip
Was this page helpful?