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Conferences

Evaluation of New In-Chip and Arrayed Line Overlay

Author(s)
Ravikiran Attota, Richard M. Silver, M R. Bishop, Egon Marx, Jay S. Jun, Michael T. Stocker, M P. Davidson, Robert D. Larrabee
Two types of overlay targets have been designed and evaluated for the study of optical overlay metrology. They are in-chip and arrayed overlay targets. In-chip

Visible, EUV, and X-Ray Spectroscopy at the NIST EBIT Facility

Author(s)
John D. Gillaspy, B Blagojevic, Paul A. Dalgarno, K Fahey, V Kharchenko, J M. Laming, L Logosi, E-O Le Bigot, K Makonyi, L P. Ratliff, E Silver, H. Schnopper, E Takacs, J N. Tan, H Tawara, K Tokesi
After a brief introduction to the NIST EBIT facility, we present the results of three different types of experiments that have been carried out there recently

Specifying Autonomy Levels for Unmanned Systems: Interim Report

Author(s)
Hui-Min Huang, James S. Albus, Elena R. Messina, R C. Wade, W English
The viability of Unmanned Systems as tools is increasingly recognized in many domains. As technology advances, the autonomy on board these systems also advances

Influence of Heating Rate on Flow Stress in High-Speed Machining Processes

Author(s)
Timothy J. Burns, Robert W. Ivester, Michael Kennedy, Richard L. Rhorer, Matthew A. Davies, Howard Yoon, Lyle E. Levine, Richard J. Fields, D Basak, Eric P. Whitenton
For several decades, a major focus of machining research has been the measurement and prediction of temperature. Here, the influence of the rate of heating on

Dynamic Mechanical Analysis of Pure Mg and Mg AZ31 Alloy

Author(s)
A -. Munitz, D -. Dayan, David J. Pitchure, Richard E. Ricker
Dynamic mechanical analyses were performed on pure Mg and Mg AZ31 alloy to study the impact of thermo-mechanical state and grain structure on the complex
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