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Reliability Metrology for the Semiconductor Industry at NIST



Stephen Knight, John S. Suehle, Joaquin (. Martinez


The National Institute of Standards and Technology provides critical metrology development for the semiconductor manufacturing industry as it moves from the microelectronics era into the nanoelectronics era. This presentation will describe the National Semiconductor Metrology Program, a program assisting the semiconductor manufacturing industry and its supporting infrastructure industries by developing critical metrology. A key emphasis of many of the projects is accurate assessment of reliability.
Proceedings Title
GOMACTech-04: Transformational Technologies
Conference Dates
March 15-18, 2004
Conference Location
Monterey, CA, USA
Conference Title
GOMACTech-04: Transformational Technologies


CMOS, molecular electronics, nanoelectronics, reliability


Knight, S. , Suehle, J. and Martinez, J. (2004), Reliability Metrology for the Semiconductor Industry at NIST, GOMACTech-04: Transformational Technologies, Monterey, CA, USA (Accessed July 19, 2024)


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Created April 9, 2004, Updated October 12, 2021