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Reliability Metrology for the Semiconductor Industry at NIST
Published
Author(s)
Stephen Knight, John S. Suehle, Joaquin (. Martinez
Abstract
The National Institute of Standards and Technology provides critical metrology development for the semiconductor manufacturing industry as it moves from the microelectronics era into the nanoelectronics era. This presentation will describe the National Semiconductor Metrology Program, a program assisting the semiconductor manufacturing industry and its supporting infrastructure industries by developing critical metrology. A key emphasis of many of the projects is accurate assessment of reliability.
Knight, S.
, Suehle, J.
and Martinez, J.
(2004),
Reliability Metrology for the Semiconductor Industry at NIST, GOMACTech-04: Transformational Technologies, Monterey, CA, USA
(Accessed March 28, 2024)