@conference{760511,
  author = {Stephen Knight and John Suehle and Joaquin Martinez},
  title = {Reliability Metrology for the Semiconductor Industry at NIST},
  year = {2004},
  month = {2004-04-10 00:04:00},
  publisher = {GOMACTech-04: Transformational Technologies, Monterey, CA, USA},
  language = {en},
}