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Conferences

Photoluminescence from an Nd3+ doped AlGaAs semiconductor structure

Author(s)
Kirk Ullmann, Mark Su, Kevin L. Silverman, Joseph J. Berry, Todd E. Harvey, Richard Mirin
We report room temperature photoluminescence from a Nd3+ doped AlGaAs semiconductor. Oxidation of the AlGaAs greatly improves the luminescence efficiency of the...

Absolute frequency measurements with a stabilized near-infrared optical frequency comb from a Cr:forsterite laser

Author(s)
Kristan L. Corwin, I Thomann, Tasshi Dennis, R W. Fox, William C. Swann, E. A. Curtis, C. W. Oates, G Wilpers, A Bartels, Sarah L. Gilbert, Leo W. Hollberg, Scott Diddams, Nathan R. Newbury, Jeffrey W. Nicholson, M. Yan
A Cr:forsterite laser-based frequency comb is stabilized simultaneously to two NIST frequency references. Methane lines from 1315 nm - 1330 nm are measured with...

IPPS: An Integrated Process Planning System

Author(s)
Suber Huang, J Mei, Xuhang Tong, Steven R. Ray
The past two decades have witnessed the development of many CAPP (Computer-Aided Process Planning) systems. From variant process planning to generative process...

High-Resolution Optical Overlay Metrology

Author(s)
Richard M. Silver, Ravikiran Attota, M R. Bishop, Jay S. Jun, Egon Marx, M P. Davidson, Robert D. Larrabee
Optical methods are often thought to lose their effectiveness as a metrology tool beyond the Rayleigh criterion. However, using advanced modeling methods, the...
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