Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Temperature Measurements of Semiconductor Devices-A Review

Published

Author(s)

David L. Blackburn

Abstract

There are numerous methods for measuring the temperature of an operating semiconductor device. The methods can be broadly placed into three generic categories; electrical, optical, and physically contacting. The fundamentals underlying each of the categories are discussed and a review of the variety of techniques within each category is given. Some of the advantages and disadvantages as well as the spatial, time, and temperature resolution are also provided.
Proceedings Title
Proceedings of the 20th IEEE Semiconductor Temperature Measurement and Management Symposium
Conference Dates
March 9-11, 2004
Conference Location
San Jose, CA
Conference Title
SEMITHERM

Keywords

Electrical, measurements, optical, semiconductor, temperature

Citation

Blackburn, D. (2004), Temperature Measurements of Semiconductor Devices-A Review, Proceedings of the 20th IEEE Semiconductor Temperature Measurement and Management Symposium, San Jose, CA (Accessed October 5, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 10, 2004, Updated January 27, 2020