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Temperature Measurements of Semiconductor Devices-A Review

Published

Author(s)

David L. Blackburn

Abstract

There are numerous methods for measuring the temperature of an operating semiconductor device. The methods can be broadly placed into three generic categories; electrical, optical, and physically contacting. The fundamentals underlying each of the categories are discussed and a review of the variety of techniques within each category is given. Some of the advantages and disadvantages as well as the spatial, time, and temperature resolution are also provided.
Proceedings Title
Proceedings of the 20th IEEE Semiconductor Temperature Measurement and Management Symposium
Conference Dates
March 9-11, 2004
Conference Location
San Jose, CA
Conference Title
SEMITHERM

Keywords

Electrical, measurements, optical, semiconductor, temperature

Citation

Blackburn, D. (2004), Temperature Measurements of Semiconductor Devices-A Review, Proceedings of the 20th IEEE Semiconductor Temperature Measurement and Management Symposium, San Jose, CA (Accessed May 21, 2024)

Issues

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Created March 10, 2004, Updated January 27, 2020