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Conferences

Evaluation of New In-Chip and Arrayed Line Overlay

Author(s)
Ravikiran Attota, Richard M. Silver, M R. Bishop, Egon Marx, Jay S. Jun, Michael T. Stocker, M P. Davidson, Robert D. Larrabee
Two types of overlay targets have been designed and evaluated for the study of optical overlay metrology. They are in-chip and arrayed overlay targets. In-chip...

Visible, EUV, and X-Ray Spectroscopy at the NIST EBIT Facility

Author(s)
John D. Gillaspy, B Blagojevic, Paul A. Dalgarno, K Fahey, V Kharchenko, J M. Laming, L Logosi, E-O Le Bigot, K Makonyi, L P. Ratliff, E Silver, H. Schnopper, E Takacs, J N. Tan, H Tawara, K Tokesi
After a brief introduction to the NIST EBIT facility, we present the results of three different types of experiments that have been carried out there recently...

Specifying Autonomy Levels for Unmanned Systems: Interim Report

Author(s)
Hui-Min Huang, James S. Albus, Elena R. Messina, R C. Wade, W English
The viability of Unmanned Systems as tools is increasingly recognized in many domains. As technology advances, the autonomy on board these systems also advances...

Beyond Geometry: Issues in Product Representation

Author(s)
Ram D. Sriram
Slides presented at the Innovative Design of Complex Aerospace Systems Workshop at held at the NASA Langley Research Center in Hampton, Virginia, on March 24...
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