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Conferences

A Phase Locked, Fiber Laser-Based Frequency Comb: Limit On Optical Linewidth

May 1, 2004

Author(s)

Brian Washburn, Scott Diddams, Nathan R. Newbury

A phase-locked fiber laser-based supercontinuum source is presented. The linewidth of a single line of the IR frequency comb produced by fiber laser-based...

Dimensional Metrology of Resist Lines Using a SEM Model-Based Library Approach

May 1, 2004

Author(s)

John S. Villarrubia, Andras Vladar, B Bunday, M R. Bishop

The widths of 284 lines in a 193 nm resist were measured by two methods and the results compared. One method was scanning electron microscopy (SEM) of cross...

Determination of Optimal Parameters for CD-SEM Measurement of Line Edge Roughness

May 1, 2004

Author(s)

B Bunday, M R. Bishop, D Mccormack, John S. Villarrubia, Andras Vladar, Theodore V. Vorburger, Ndubuisi George Orji, J Allgair

The measurement of line-edge roughness (LER) has recently become a topic of concern in the litho-metrology community and the semiconductor industry as a whole...

Improving the Uncertainty of Photomask Linewidth Measurements

May 1, 2004

Author(s)

J Pedulla, James E. Potzick, Richard M. Silver

The National Institute of Standards and Technology (NIST) is currently developing a photomask linewidth standard (SRM 2059) with a lower expected uncertainty of...

An Image Stitching Method to Eliminate the Distortion of the Sidewall in Linewidth Measurement

May 1, 2004

Author(s)

Xuezeng Zhao, Joseph Fu, Wei Chu, C Nguyen, Theodore V. Vorburger

Nano-scale linewidth measurements are performed in semiconductor manufacturing, the data storage industry, and micro-mechanical engineering. It is well known...

Scalability of OLED Fluorescence in Consideration of Sunlight-Readability Reflection Measurements

May 1, 2004

Author(s)

Edward F. Kelley, John Penczek

The fluorescence characteristics of an OLED material are demonstrated to be linear with sunlight-like illuminance levels up to several suns. It is therefore...

Face Recognition using 3D Facial Shape and Color Map Information: Comparison and Combination

April 30, 2004

Author(s)

Afzal A. Godil, Sanford P. Ressler, Patrick J. Grother

In this paper, we investigate the use of 3D surface geometry for face recognition and compare it to one based on color map information. The 3D surface and color...

Characterizing the Entangling Capacity of n-qubit Computations

April 30, 2004

Author(s)

Stephen Bullock, G K. Brennen

Finding Small Two-Qubit Circuits

April 30, 2004

Author(s)

V V. Shende, I L. Markov, Stephen Bullock

Acceleration Factors and Mechanistic Study of Progressive Breakdown in Small Area Ultra-thin Gate Oxides

April 29, 2004

Author(s)

John S. Suehle, Baozhong Zhu, Yuan Chen, Joseph B. Berstein

Two post soft breakdown modes are studied: one in which the conducting filament is stable until hard breakdown occurs and one in which the filament continually...

Real-Time I/O Performance Metrics and Tests for Industrial Ethernet

April 28, 2004

Author(s)

James D. Gilsinn

Real-time input/output (I/O) communication over Ethernet is still fairly new in the industrial environment. There are many questions about the reliability and...

3d, Quantitative Image Analysis Of Poly(ε-caprolactone) Scaffolds With Bicontinuous Morphology

April 27, 2004

Author(s)

Joy P. Dunkers, Forrest A. Landis, K Niihara, Hiropshi Jinai

It has been shown that scaffold microstructure impacts cell response.1 Determining the relationship between scaffold structure and cellular response facilitates...

Visible, EUV, and X-Ray Spectroscopy at the NIST EBIT Facility

April 24, 2004

Author(s)

John D. Gillaspy, B Blagojevic, Paul A. Dalgarno, K Fahey, V Kharchenko, J M. Laming, L Logosi, E-O Le Bigot, K Makonyi, L P. Ratliff, E Silver, H. Schnopper, E Takacs, J N. Tan, H Tawara, K Tokesi

After a brief introduction to the NIST EBIT facility, we present the results of three different types of experiments that have been carried out there recently...

Specifying Autonomy Levels for Unmanned Systems: Interim Report

April 16, 2004

Author(s)

Hui-Min Huang, James S. Albus, Elena R. Messina, R C. Wade, W English

The viability of Unmanned Systems as tools is increasingly recognized in many domains. As technology advances, the autonomy on board these systems also advances...

Reliability Metrology for the Semiconductor Industry at NIST

April 10, 2004

Author(s)

Stephen Knight, John S. Suehle, Joaquin (. Martinez

The National Institute of Standards and Technology provides critical metrology development for the semiconductor manufacturing industry as it moves from the...

Infrared Spectral Emissivity Characterization Facility at NIST

April 1, 2004

Author(s)

Leonard M. Hanssen, Sergey Mekhontsev, V B. Khromchenko

Comparing the Transient Response of a Resistive-Type Sensor With a Thin Film Thermocouple During the Post-Exposure Bake Process

April 1, 2004

Author(s)

Kenneth G. Kreider, D P. DeWitt, J B. Fowler, J E. Proctor, William A. Kimes, Dean C. Ripple, Benjamin K. Tsai

Recent studies on dynamic temperature profiling and lithographic performance modeling of the post-exposure bake (PEB) process have demonstrated that the rate of...

Improving Software Quality Through Better Design and Testing

April 1, 2004

Author(s)

John Barkley, Mark Skall

Our results extending Kuhn's fault class hierarchy provide a justification for the focus of fault-based testing strategies on detecting particular faults and...

Static Vs. Dynamic Regenerator Assignment in Optical Switches: Models and Cost Trade-Offs

April 1, 2004

Author(s)

Kotikalapudi Sriram, David W. Griffith, R Su, Nada T. Golmie

Process Control and Logistics Management for Mass Customization Manufacturing

April 1, 2004

Author(s)

Guixiu Qiao, R F. Lu, Charles R. McLean

The emphasis on increasing product variety and individualization has created a strong demand for a new strategy of Mass Customization Manufacturing (MCM). A...

Beyond Geometry: Issues in Product Representation

April 1, 2004

Author(s)

Ram D. Sriram

Slides presented at the Innovative Design of Complex Aerospace Systems Workshop at held at the NASA Langley Research Center in Hampton, Virginia, on March 24...

Multiplexed Assays for Evaluation of Y-SNP Markers in U.S. Populations

April 1, 2004

Author(s)

Peter Vallone, John Butler

Genetic markers located on the Y chromosome are of increasing importance in human identity testing. In an effort to evaluate the forensic utility of Y...

SCC Evolution of Formwork Hydraulic Pressure and Rheological Properties

April 1, 2004

Author(s)

S Amziane, Chiara C. Ferraris

An experimental investigation was performed to determine the hydraulic pressure variation of cementitious based materials (cement paste, concrete, SCC, etc.)...

Material Modeling and Experimental Study of Serrated Chip Morphology

April 1, 2004

Author(s)

T Mabrouki, Laurent Deshayes, J F. Rigal, Kevin K. Jurrens, Robert W. Ivester

Machining chip morphology stems from mechanical, thermal, and chemical phenomena. Chip morphology prediction depends on a fundamental understanding of these...

Influence of Heating Rate on Flow Stress in High-Speed Machining Processes

April 1, 2004

Author(s)

Timothy J. Burns, Robert W. Ivester, Michael Kennedy, Richard L. Rhorer, Matthew A. Davies, Howard Yoon, Lyle E. Levine, Richard J. Fields, D Basak, Eric P. Whitenton

For several decades, a major focus of machining research has been the measurement and prediction of temperature. Here, the influence of the rate of heating on...

Evaluating Interactive Information Retrieval Systems: Opportunities and Challenges

April 1, 2004

Author(s)

N Belkin, S Dumais, Jean C. Scholtz, R Wilkinson

This special interest group seeks to articulate some of the challenges and designing and evaluating interactive information retrieval systems.

Design Guidelines for Improved Human-Robot Interaction

April 1, 2004

Author(s)

J L. Drury, D Hestand, Holly A. Yanco, Jean C. Scholtz

This poster presents some initial design guidelines for HRI as a result of our analysis of HRI awareness anomalies.

Dynamic Mechanical Analysis of Pure Mg and Mg AZ31 Alloy

April 1, 2004

Author(s)

A -. Munitz, D -. Dayan, David J. Pitchure, Richard E. Ricker

Dynamic mechanical analyses were performed on pure Mg and Mg AZ31 alloy to study the impact of thermo-mechanical state and grain structure on the complex...

X-Ray Reflectivity Porosimetry for the Characterization of Porous Low-K Dielectric Constant Thin Films

April 1, 2004

Author(s)

Christopher Soles, V. J. Lee, R C. Hedden, D W. Liu, Barry J. Bauer, Wen-Li Wu

X-ray reflectivity porosimetry is a highly sensitive measurement method used to quantify the capillary condensation of a solvent vapor inside porous low-k...

Testing Requirements to Manage Data Exchange Specifications in Enterprise Integration - A Schema Design Quality Focus

April 1, 2004

Author(s)

Boonserm Kulvatunyou, Nenad Ivezic, Jeong Buhwan

In this paper, we describe the requirements to test W3C XML Schema usage when defining message schemas for data exchange in any large and evolving enterprise...

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