Damazo, B.
, Jayewardene, C.
, Vladar, A.
, Keery, W.
and Postek, M.
(2004),
New Method for the Measurement of SEM Stage Vibrations, Metrology, Inspection and Process Control for Microlithography | 18th | Proceedings of the SPIE--the International Society for Optical Engineering: Metrology, Inspection and Process Control for Microlithography XVIII, 2004 | SPIE
(Accessed December 11, 2024)
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New Method for the Measurement of SEM Stage Vibrations
Published
Author(s)
, Crossley E. Jayewardene, , ,
Proceedings Title
Metrology, Inspection and Process Control for Microlithography | 18th | Proceedings of the SPIE--the International Society for Optical Engineering: Metrology, Inspection and Process Control for Microlithography XVIII, 2004 | SPIE
Volume
5375
Issue
Part 2
Conference Dates
February 23-27, 2004
Conference Title
Proceedings of SPIE--the International Society for Optical Engineering
Pub Type
Conferences
Keywords
interferometer, laser, magnification, sample state, SEM, vibration
Citation
Issues
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Created February 1, 2004, Updated February 19, 2017