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New Method for the Measurement of SEM Stage Vibrations

Published

Author(s)

Bradley N. Damazo, Crossley E. Jayewardene, Andras Vladar, William J. Keery, Michael T. Postek
Proceedings Title
Metrology, Inspection and Process Control for Microlithography | 18th | Proceedings of the SPIE--the International Society for Optical Engineering: Metrology, Inspection and Process Control for Microlithography XVIII, 2004 | SPIE
Volume
5375
Issue
Part 2
Conference Dates
February 23-27, 2004
Conference Title
Proceedings of SPIE--the International Society for Optical Engineering

Keywords

interferometer, laser, magnification, sample state, SEM, vibration

Citation

Damazo, B. , Jayewardene, C. , Vladar, A. , Keery, W. and Postek, M. (2004), New Method for the Measurement of SEM Stage Vibrations, Metrology, Inspection and Process Control for Microlithography | 18th | Proceedings of the SPIE--the International Society for Optical Engineering: Metrology, Inspection and Process Control for Microlithography XVIII, 2004 | SPIE (Accessed May 29, 2024)

Issues

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Created February 1, 2004, Updated February 19, 2017