@conference{105401,
  author = {Bradley Damazo and Crossley Jayewardene and Andras Vladar and William Keery and Michael Postek},
  title = {New Method for the Measurement of SEM Stage Vibrations},
  year = {2004},
  number = {5375},
  month = {2004-02-01},
  publisher = {Metrology, Inspection and Process Control for Microlithography | 18th | Proceedings of the SPIE--the International Society for Optical Engineering:  Metrology, Inspection and Process Control for Microlithography XVIII, 2004 | SPIE},
  language = {en},
}