Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Pore Size Distributions in Low-k Dielectric Thin Films From SANS Porosimetry

Published

Author(s)

R C. Hedden, V. J. Lee, Christopher L. Soles, Barry J. Bauer

Abstract

A small-angle neutron scattering (SANS) porosimetry technique is presented for characterization of pore structure in nanoporous thin films. Porosimetry experiments are conducted using a contrast match solvent (a mixture of toluene-d8 and toluene-h8) having the same neutron scattering length density as that of the nanoporous film matrix. The film is exposed to contrast match toluene vapor in a carrier gas (air), and pores fill with liquid by capillary condensation. The partial pressure of the solvent vapor is increased stepwise from pure air to saturated solvent vapor, and then decreased stepwise to pure air. As the solvent partial pressure increases, pores fill with liquid solvent progressively from smallest to largest.
Proceedings Title
American Chemical Society Division of Polymeric Materials: Science and Engineering Meeting |227th | Proceedings of the ACS Division of Polymeric Materials: Science & Engineering | ACS
Volume
296
Issue
Pt. 2
Conference Dates
March 28-29, 2003
Conference Title
Abstracts of Papers - American Chemical Society

Keywords

chord length, high concentration, pore, scattering, two-phase

Citation

Hedden, R. , Lee, V. , Soles, C. and Bauer, B. (2004), Pore Size Distributions in Low-k Dielectric Thin Films From SANS Porosimetry, American Chemical Society Division of Polymeric Materials: Science and Engineering Meeting |227th | Proceedings of the ACS Division of Polymeric Materials: Science & Engineering | ACS, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852284 (Accessed June 5, 2023)
Created March 1, 2004, Updated February 17, 2017