@conference{170506, author = {R Hedden and V. Lee and Christopher Soles and Barry Bauer}, title = {Pore Size Distributions in Low-k Dielectric Thin Films From SANS Porosimetry}, year = {2004}, number = {296}, month = {2004-03-01}, publisher = {American Chemical Society Division of Polymeric Materials: Science and Engineering Meeting |227th | Proceedings of the ACS Division of Polymeric Materials: Science & Engineering | ACS}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852284}, language = {en}, }