TY  - CONF
AU  - R Hedden
AU  - V. Lee
AU  - Christopher Soles
AU  - Barry Bauer
C2  - American Chemical Society Division of Polymeric Materials: Science and Engineering Meeting |227th  | Proceedings of the ACS Division of Polymeric Materials: Science & Engineering | ACS
DA  - 2004-03-01
LA  - en
M1  - 296
PB  - American Chemical Society Division of Polymeric Materials: Science and Engineering Meeting |227th  | Proceedings of the ACS Division of Polymeric Materials: Science & Engineering | ACS
PY  - 2004
TI  - Pore Size Distributions in Low-k Dielectric Thin Films From SANS Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852284
ER  -