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Study on an Image Stitching Method for Linewidth Measurement

Published

Author(s)

Wei Chu, Xuezeng Zhao, Joseph Fu, Theodore V. Vorburger
Proceedings Title
Photomask Japan
Volume
5446
Issue
Pt. 2
Conference Dates
April 14-16, 2004
Conference Location
, 1, JA
Conference Title
Proceedings of SPIE--the International Society for Optical Engineering

Keywords

atomic force microscopy (AFM), image registration, image stiching method, linewidth, nanotube probe, sidewall

Citation

Chu, W. , Zhao, X. , Fu, J. and Vorburger, T. (2004), Study on an Image Stitching Method for Linewidth Measurement, Photomask Japan, , 1, JA (Accessed May 19, 2024)

Issues

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Created March 31, 2004, Updated October 12, 2021