NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Conferences

Absolute frequency measurements with a stabilized near-infrared optical frequency comb from a Cr:forsterite laser

Author(s)
Kristan L. Corwin, I Thomann, Tasshi Dennis, R W. Fox, William C. Swann, E. A. Curtis, C. W. Oates, G Wilpers, A Bartels, Sarah L. Gilbert, Leo W. Hollberg, Scott Diddams, Nathan R. Newbury, Jeffrey W. Nicholson, M. Yan
A Cr:forsterite laser-based frequency comb is stabilized simultaneously to two NIST frequency references. Methane lines from 1315 nm - 1330 nm are measured with

IPPS: An Integrated Process Planning System

Author(s)
Suber Huang, J Mei, Xuhang Tong, Steven R. Ray
The past two decades have witnessed the development of many CAPP (Computer-Aided Process Planning) systems. From variant process planning to generative process

High-Resolution Optical Overlay Metrology

Author(s)
Richard M. Silver, Ravikiran Attota, M R. Bishop, Jay S. Jun, Egon Marx, M P. Davidson, Robert D. Larrabee
Optical methods are often thought to lose their effectiveness as a metrology tool beyond the Rayleigh criterion. However, using advanced modeling methods, the

Evaluation of New In-Chip and Arrayed Line Overlay

Author(s)
Ravikiran Attota, Richard M. Silver, M R. Bishop, Egon Marx, Jay S. Jun, Michael T. Stocker, M P. Davidson, Robert D. Larrabee
Two types of overlay targets have been designed and evaluated for the study of optical overlay metrology. They are in-chip and arrayed overlay targets. In-chip
Was this page helpful?