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Publications

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This publications database includes many of the most recent publications of the National Institute of Standards and Technology (NIST). The database, however, is not complete. Additional publications are added on a continual basis.

If you have difficulties in locating a specific publication, please contact reflib [at] nist.gov (reflib[at]nist[dot]gov) and provide any information you may have, including title, author, publication series, or date published.

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Recent Publications

A Plan for Global Engagement on AI Standards

Author(s)
Jesse Dunietz, Mark Latonero, Kathleen Roberts
This plan has been developed by the Department of Commerce in coordination with the Department of State and agencies across the U.S. Government. It reflects

Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

Author(s)
Bryan Barnes, Aaron Chew, Nicholas Jenkins, Yunzhe Shao, Martin Sohn, Regis Kline, Daniel Sunday, Purnima Balakrishnan, Thomas Germer, Steven Grantham, Clay Klein, Stephanie Moffitt, Eric Shirley, Henry Kapteyn, MARGARET MURNANE
Background: The industry is developing extreme-ultraviolet wavelength (EUV) techniques to measure critical dimensions (CDs) in logic fabrication. As nascent
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