Nanotechnology

Center for Nanoscale Science and Technology

George Orji using a pair of tweezers to make an adjustment to an instrument.

What To Do When Measurement Methods Produce Different Answers (blog post)

Jabez, McClelland, Adam Steele and Brenton Knuffman pose in their lab with their cesium ion source.

An Invention in Focus: When Science Gets Real (blog post)

News and Updates

Roll-Up TVs and Bendable Smartphones: Toward More Choices for Flexible Electronic Materials

March 6, 2020

Have you heard of foldable smartphones? How about the flexible television screen that rolls up into a box? Or the

NIST Scientists and Engineers Pitch Innovations to Venture Capitalists

December 18, 2019

The Technology Partnerships Office (TPO) at the National Institute of Standards and Technology (NIST), on December 02

Square checkerboard with 32 squares on each side surrounded by sunbeam-like lines emanating out from around the board.

NIST’s Light-Sensing Camera May Help Detect Extraterrestrial Life, Dark Matter

November 19, 2019

Researchers at the National Institute of Standards and Technology (NIST) have made one of the highest-performance

SBIR funds internationally marketable quality audit instrument

November 1, 2019

En’Urga Inc., an advanced diagnostic equipment company, recently found success with a Small Business Innovation Research

Events

2020 International Scanning Probe Microscopy (ISPM) + Scanning Probe Microscopy on Soft & Polymeric Materials (SPMonSPM)

Sun, May 31 - Thu, Jun 4 2020

NIST is closely monitoring guidance from Federal, State, and local health authorities on the outbreak of COVID-19. To

Industry Impacts

Illustrative subset of parameterized shapes available for nanoscale photonic, electronic, mechanic, fluidic, and other applications.

Nanolithography Design Tools

Accurate production of nanoscale features on semiconductor chips is essential to their performance, but typical design tools cater to the dominance of straight

SEMPA image showing the magnetization of an unpatterned region of Ta/CoFeB.

Imaging for Magnetic Data Storage Designs

Manufacturers of magnetic data storage are continually developing higher density devices to meet the demand for faster, longer-lasting and lower-energy IT

Projects and Programs

Chemical Functionalization and Manipulation of Nano Materials

This project focuses on understanding the potential for nanoscale engineered materials to advance state-of-the-art spectroscopic techniques and foster the

PTIR combines the spatial resolution of AFM with the specificity of absorption spectroscopy

Nano-Chemical Imaging and -Spectroscopy (IR, nIR, VIS)

Conventional techniques for analyzing chemical composition, such as infrared (IR) microscopy often miss critically important nanoscale details. To overcome this

Mapping of Strain Fields and Phase Distributions of Indented Si using Raman-Spectroscopy Enhanced Instrumented Indentation Technique (IIT)

In Raman-spectroscopy enhanced IIT, an indentation device that is coupled with a Raman microscope to conduct in situ spectroscopic and optical analysis of

Amplifiers

To process quantum information it is important to have amplifiers with wide bandwidth, high dynamic range, and low noise.

Publications

Field Ion Emission in an Atom Probe Microscope Triggered by Femtosecond-Pulsed Coherent Extreme Ultraviolet Light

March 12, 2020

Author(s)

Ann C. Chiaramonti Debay, Luis Miaja Avila, Benjamin W. Caplins, Paul T. Blanchard, Norman A. Sanford, Brian Gorman, David R. Diercks

This paper reports construction of an extreme ultraviolet (EUV) radiation-triggered atom probe tomograph and describes the results from initial experiments on

Defining Near-term to Long-term Research Opportunities to Advance Metrics, Models, and Methods for Smart and Sustainable Manufacturing

February 21, 2020

Author(s)

Arvind Shankar Raman, Karl Haapala, Kamyar Raoufi, Barbara S. Linke, William Z. Bernstein, Katherine C. Morris

Over the past century, research has focused on continuously improving the performance of manufacturing processes and systems - often measured in terms of cost

Imaging Carrier Inhomogeneities in Ambipolar Tellurene Field Effect Transistors

February 12, 2020

Author(s)

Samuel Berweger, Gang Qiu, Yixiu Wang, Benjamin Pollard, Kristen L. Genter, Thomas M. Wallis, Wenzhuo Wu, Peide Ye, Pavel Kabos

Bipolar transport underpins a wide range of semiconductor homojunction device functionalities such as pn junctions or transistors. The capability to image and

Metal adsorbate interactions and the convergence of density functional calculations

February 10, 2020

Author(s)

Christoph Rohmann, Maicol A. Ochoa, Michael P. Zwolak

The adsorption of metal atoms on nanostructures, such as graphene and nanotubes, plays an important role in catalysis, electronic doping, and tuning material

Software

Cover page for Nanolithography Toolbox manual

CNST Nanolithography Toolbox

October 5, 2016

The Nanolithography Toolbox is a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and

HolograFREE

An electron hologram is a fringe modulated image containing the amplitude and phase information of an electron transparent object. The HolograFREE routines

SOEN Process Design Kits

This technology package, a.k.a process design kit (PDK), defines the NIST superconducting optoelectronics process: OLMAC. It is in the klayout format of

MOSAIC

MOSAIC is a modular analysis toolbox to decode multi-state nanopore data. MOSAIC leverages the underlying physics of the system to considerably increase the

Tools and Instruments

NanoFab Tool: Plasma-Therm Versaline High Density Plasma Chemical Vapor Deposition (HDPCVD)

The Plasma-Therm Versaline high density plasma chemical vapor deposition (HDPCVD) system uses an inductively coupled plasma to remotely ionize deposition

Photograph of the Semitool PSC-101 double stack spin rinse dryer.

NanoFab Tool: Semitool PSC-101 Spin Rinse Dryer

The Semitool PSC-101 spin rinse dryer uses deionized water to rinse and heated nitrogen to dry whole wafer substrates automatically after wet chemical processes

Photograph of the Reynolds Tech silicon etch wet bench.

NanoFab Tool: Reynolds Tech Silicon Etch Wet Bench

The Reynolds Tech silicon etch wet bench uses dilute potassium hydroxide (KOH) to preferentially etch silicon along the material's crystal planes. The process

Photograph of the Reynolds Tech silicon nitride etch wet bench.

NanoFab Tool: Reynolds Tech Silicon Nitride Etch Wet Bench

The Reynolds Tech silicon nitride etch wet bench uses dilute phosphoric acid to preferentially etch silicon nitride on silicon. The process is used to define

Nanotechnology

News and Updates

Roll-Up TVs and Bendable Smartphones: Toward More Choices for Flexible Electronic Materials

NIST Scientists and Engineers Pitch Innovations to Venture Capitalists

NIST’s Light-Sensing Camera May Help Detect Extraterrestrial Life, Dark Matter

SBIR funds internationally marketable quality audit instrument

Events

2020 International Scanning Probe Microscopy (ISPM) + Scanning Probe Microscopy on Soft & Polymeric Materials (SPMonSPM)

Industry Impacts

Nanolithography Design Tools

Imaging for Magnetic Data Storage Designs

Projects and Programs

Chemical Functionalization and Manipulation of Nano Materials

Nano-Chemical Imaging and -Spectroscopy (IR, nIR, VIS)

Mapping of Strain Fields and Phase Distributions of Indented Si using Raman-Spectroscopy Enhanced Instrumented Indentation Technique (IIT)

Amplifiers

Publications

Field Ion Emission in an Atom Probe Microscope Triggered by Femtosecond-Pulsed Coherent Extreme Ultraviolet Light

Defining Near-term to Long-term Research Opportunities to Advance Metrics, Models, and Methods for Smart and Sustainable Manufacturing

Imaging Carrier Inhomogeneities in Ambipolar Tellurene Field Effect Transistors

Metal adsorbate interactions and the convergence of density functional calculations

Software

CNST Nanolithography Toolbox

HolograFREE

SOEN Process Design Kits

MOSAIC

Tools and Instruments

NanoFab Tool: Plasma-Therm Versaline High Density Plasma Chemical Vapor Deposition (HDPCVD)

NanoFab Tool: Semitool PSC-101 Spin Rinse Dryer

NanoFab Tool: Reynolds Tech Silicon Etch Wet Bench

NanoFab Tool: Reynolds Tech Silicon Nitride Etch Wet Bench

Awards

Elijah Petersen Receives ACS Chemical Research in Toxicology Award

Branco Weiss Fellowship (Society in Science) - Christian Haffner

2018 Excellence in Research in Physical Sciences Award - Mark D. Stiles

Obrzut Receives the 2016 International Electrotechnical Commission's (IEC) 1906 Award