November 30, 2013
Author(s)
Eduard Rocas, Juan C. Collado Gomez, Jordi Mateu, Nathan D. Orloff, James C. Booth, Robert Aigner
We present the electro-thermo-mechanical constitutive relations, expanded up to the third order, for a BAW resonator. The relations obtained are implemented into a circuit model, which is validated with extensive linear and nonlinear measurements. The