Characterization of the First Order Nonlinear Stiffened Elasticity of the Piezoelectric Layer in Bulk Acoustic Wave Resonators
Juan C. Collado Gomez, Eduard Rocas, Jordi Mateu, Nathan D. Orloff, James C. Booth, Alberto Padillo, Juan Callaghan
This work proposes a procedure to characterize the intrinsic nonlinearities of bulk acoustic wave resonators by performing one port measurements of the second harmonic and second order intermodulation spurious signals. Closed-form expressions have been derived that relate the nonlinear stiffened elasticity with experimental observables. These formulas are valid in a wide margin of frequencies around resonance and have been verified with nonlinear circuit simulations. The measurement set-up and its effects are also treated in our approach. Measurements of a set of Aluminum Nitride based devices from several manufacturers yield consistent model parameters and allow us to obtain a nonlinear stiffened elasticity intrinsic to this piezoelectric material.
IEEE Transactions on Microwave Theory and Techniques
, Rocas, E.
, Mateu, J.
, Orloff, N.
, Booth, J.
, Padillo, A.
and Callaghan, J.
Characterization of the First Order Nonlinear Stiffened Elasticity of the Piezoelectric Layer in Bulk Acoustic Wave Resonators, IEEE Transactions on Microwave Theory and Techniques
(Accessed December 9, 2023)