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Vector-Network-Analyzer Calibration Using Line and Multiple Coplanar-Waveguide Offset Reflects
Published
Author(s)
Arkadiusz C. Lewandowski, Wojciech Wiatr, Dazhen Gu, Nate Orloff, Thomas Mitchell (Mitch) Wallis, Pavel Kabos
Abstract
We present the application of our newly developed multi-reflect-thru technique to vector-network-analyzer calibration in the on-wafer environment. This technique uses a set of highly-reflective one-port devices, referred to as offset-reflects, and a single transmission line sections. The offset reflects are constructed as transmission-line sections of different lengths terminated with the same highly-reflective load. Neither the propagation constant of the transmission-line sections, nor the load impedance need to be known, as they are determined along with the vector-network-analyzer calibration coefficients from the calibration standard measurements. We verify our approach by performing vector-network analyzer calibration in the 0.7-40 GHz frequency range with a set of offset-short and offset-open devices manufactured on a 0.5 mm thick quartz wafer, and comparing it with the classical multiline through-reflect-line calibration. The results we obtained agree well proving the validity of our approach
Lewandowski, A.
, Wiatr, W.
, Gu, D.
, Orloff, N.
, Wallis, T.
and Kabos, P.
(2016),
Vector-Network-Analyzer Calibration Using Line and Multiple Coplanar-Waveguide Offset Reflects, IEEE Microwave and Wireless Components Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909577
(Accessed October 13, 2025)