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Search Publications by: Steve Semancik (Fed)

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Displaying 26 - 50 of 107

Methods for Optimizing and Extending the Performance of Chemiresistive Gas Microsensors

November 3, 2013
Author(s)
Kurt D. Benkstein, Alexander (. Vergara Tinoco, Christopher B. Montgomery, Baranidharan Raman, Stephen Semancik
This paper briefly describes varied concepts developed and implemented to enhance the performance of gas-phase chemical microsensors. The developments are illustrated for chemiresistive (MEMS) microdevices, and involve efficient, array-based approaches to

Fluctuation Enhanced Sensing (FES) with a Nanostructured Semiconducting Metal Oxide Film for Gas Detection and Classification

October 31, 2013
Author(s)
Bulent Ayhan, Chiman Kwan, Jin Zhou, Laszlo Kish, Kurt D. Benkstein, Phillip H. Rogers, Stephen Semancik
The feasibility of fluctuation-enhanced sensing (FES) for the detection and classification of different gases by using a single microsensor has been experimentally demonstrated. A nanostructured semiconducting metal oxide film has been used as a

Multi-resonant plasmonic nanodome arrays for label-free biosensing applications

July 10, 2013
Author(s)
Charles J. Choi, Stephen Semancik
The characteristics and utility of plasmonic nanodome arrays capable of supporting multiple resonance modes are described. A low-cost, large-area replica molding process is used to produce, on flexible plastic substrates, two-dimensional periodic arrays of

MICROHOTPLATE TEMPERATURE SENSOR CALIBRATION AND BIST

January 3, 2012
Author(s)
Muhammad Y. Afridi, Christopher B. Montgomery, Stephen Semancik, Kenneth G. Kreider, Jon C. Geist
In this paper we describe a novel long-term microhotplate temperature sensor calibration technique suitable for Built-In Self Test (BIST). The microhotplate thermal resistance (thermal efficiency) and the thermal voltage from an integrated platinum-rhodium

Microsensors in Dynamic Backgrounds: Toward Real-Time Breath Monitoring

January 15, 2010
Author(s)
Kurt D. Benkstein, Baranidharan Raman, Christopher B. Montgomery, C Martinez, Stephen Semancik
We evaluated MEMS microsensor array with chemi-resistive elements for use as a non-invasive clinical diagnostic tool to detect the presence or absence of trace amounts of disease biomarkers in simulated breath samples. The microsensor environment was

Analog BIST Functionality for Microhotplate Temperature Sensors

September 1, 2009
Author(s)
Muhammad Y. Afridi, Christopher B. Montgomery, Elliott cooper-Balis, Stephen Semancik, Kenneth G. Kreider, Jon C. Geist
In this paper we describe a novel microhotplate temperature sensor calibration technique suitable for Built-In Self Test. The technique only requires short-term temperature stability from the four-wire polysilicon heater/temperature sensors that are

Generating and Using Data of Higher Dimension for Gas-Phase Chemical Sensing

May 29, 2009
Author(s)
Baranidharan Raman, Joshua L. Hertz, Kurt D. Benkstein, Douglas C. Meier, Casey Mungle, Stephen Semancik
Methods to acquire and analyze rich data streams from sensors are helpful, if not required, to track chemical components within complex gas-phase environments. We describe a MEMS-based microsensor technology that populates multi-element arrays with

CMOS Microhotplate Technology for Chemical and Biological Agent Detection

March 16, 2009
Author(s)
Muhammad Y. Afridi, Christopher B. Montgomery, Elliott cooper-Balis, Stephen Semancik, Jon C. Geist, Alim A. Fatah
In this paper we describe microhotplates that can serve as platforms for gas sensors of potential use for homeland security and other gas sensing applications. A brief review of the fabrication of microhotplate precursors in a CMOS-compatible technology

A Method for Fabricating Conductometric Gas Sensors of Metal Oxide Nanotubes Formed in Porous Aluminum Oxide Membranes

February 2, 2009
Author(s)
Reit Artzi-Gerlitz, Kurt D. Benkstein, David L. Lahr, Joshua L. Hertz, Christopher B. Montgomery, John E. Bonevich, Stephen Semancik, Michael J. Tarlov
We describe a general, simple strategy for fabricating conductometric gas sensors from metal oxide nanotubes formed in nanoporous aluminum oxide membranes. In this approach, the aluminum oxide membrane serves as both a template for growth of the sensing

Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-Electron Beam Lithography (soft-eBL)

May 1, 2008
Author(s)
Suresh Donthu, Nasim Alem, Zixlao Pan, Shu-you Li, Gajendra Shekhawat, Vinayak Dravid, Kurt D. Benkstein, Stephen Semancik
We demonstrate the use of a facile nanopatterning scheme known as soft-electron beam lithography (soft-eBL) to fabricate and site-specifically position a variety of functional ceramic nanostructures onto fragile substrates: a 75-nm thick electron

Coupling Nanowire Chemiresistors With Microhotplate Platforms for Advanced Gas Sensing

August 6, 2007
Author(s)
Douglas C. Meier, Stephen Semancik, Bradley Button, Eugene Strelcov, Andrei Kilmakov
Recent advances in nanotechnology have yielded new materials and structures that offer great potential for improving sensitivity, selectivity and stability of the next generation of chemical gas sensors. To successfully fabricate practical devices, the

Temperature Measurements of Microhotplates Using Fluorescence Thermometry

March 1, 2006
Author(s)
Christopher W. Meyer, Douglas C. Meier, Christopher B. Montgomery, Stephen Semancik
A fluorescence microscope has been constructed for measuring surface temperatures of microhotplate platforms. The microscope measures temperature-dependent fluorescence lifetimes of a film of the phosphor Mg4(F)GeO6:Mn which is deposited on the

Characterization System for Embedded Gas Sensor Systems-on-a-Chip

December 1, 2005
Author(s)
Muhammad Y. Afridi, Allen R. Hefner Jr., Colleen E. Hood, Richard E. Cavicchi, Stephen Semancik
A characterization system is presented for evaluating critical functions of a microhotplate-based embedded gas-sensor for system-on-a-chip applications. The system uses a virtual instrument interface to control parts-per-billion (ppb) gas concentration

Chemical Warfare Agent Detection Using MEMS Microsensor Arrays

August 1, 2005
Author(s)
Douglas C. Meier, C J. Taylor, Richard E. Cavicchi, Edward White V, M W. Ellzy, K B. Sumpter, Stephen Semancik
Chemical sensors capable of accurate detection of trace quantities of chemical warfare (CW) agents would provide a potent tool for perimeter security, treaty verification, battlefield threat detection, and the protection of civilians in public places

Chemical Warfare Agent Detection Using MEMS-Compatible Microsensor Arrays

August 1, 2005
Author(s)
Douglas C. Meier, C J. Taylor, Richard E. Cavicchi, Edward White, M W. Ellzy, K B. Sumpter, Stephen Semancik
Microsensors have been fabricated consisting of TiO2 and SnO2 sensing films prepared by chemical vapor deposition (CVD) on MEMS- (micro-electromechanical systems) compatible array platforms. Response measurements from these devices to the CW agents GA