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CMOS Microhotplate Technology for Chemical and Biological Agent Detection



Muhammad Y. Afridi, Christopher B. Montgomery, Elliott cooper-Balis, Stephen Semancik, Jon C. Geist, Alim A. Fatah


In this paper we describe microhotplates that can serve as platforms for gas sensors of potential use for homeland security and other gas sensing applications. A brief review of the fabrication of microhotplate precursors in a CMOS-compatible technology and the post-processing steps required to convert them into fully functional gas-sensors is presented. We show that polysilicon, which is commonly used as both a heater and a microhotplate temperature sensor, may not be suitable for the latter use at temperatures from ambient to around 450 °C. On the other hand, the microhotplate thermal efficiency characteristic may be a suitable temperature-sensor mechanism over this same temperature range
Proceedings Title
Defense Technical Information Center (DTIC)
Conference Dates
November 17-21, 2008
Conference Location
New Orleans, LA
Conference Title
Chemical and Biological Defence Physical Science and Technology Conference 2008 Conference
(CBD PS&T 2008 Conference)


CMOS, Microhotplate, Temperature Sensor, Calibration


Afridi, M. , Montgomery, C. , cooper-Balis, E. , Semancik, S. , Geist, J. and Fatah, A. (2009), CMOS Microhotplate Technology for Chemical and Biological Agent Detection, Defense Technical Information Center (DTIC), New Orleans, LA (Accessed April 17, 2024)
Created March 16, 2009, Updated February 19, 2017