CMOS Microhotplate Technology for Chemical and Biological Agent Detection

Published

March 16, 2009

Author(s)

Muhammad Y. Afridi, Christopher B. Montgomery, Elliott cooper-Balis, Stephen Semancik, Jon C. Geist, Alim A. Fatah

Abstract

In this paper we describe microhotplates that can serve as platforms for gas sensors of potential use for homeland security and other gas sensing applications. A brief review of the fabrication of microhotplate precursors in a CMOS-compatible technology and the post-processing steps required to convert them into fully functional gas-sensors is presented. We show that polysilicon, which is commonly used as both a heater and a microhotplate temperature sensor, may not be suitable for the latter use at temperatures from ambient to around 450 °C. On the other hand, the microhotplate thermal efficiency characteristic may be a suitable temperature-sensor mechanism over this same temperature range

Proceedings Title

Defense Technical Information Center (DTIC)

Conference Dates

November 17-21, 2008

Conference Location

New Orleans, LA

Conference Title

Chemical and Biological Defence Physical Science and Technology Conference 2008 Conference
(CBD PS&T 2008 Conference)

Pub Type

Conferences

Keywords

CMOS, Microhotplate, Temperature Sensor, Calibration

Citation

Afridi, M. , Montgomery, C. , cooper-Balis, E. , Semancik, S. , Geist, J. and Fatah, A. (2009), CMOS Microhotplate Technology for Chemical and Biological Agent Detection, Defense Technical Information Center (DTIC), New Orleans, LA (Accessed December 14, 2024)