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Evaluation of Metal Oxide Nanowire Materials with Temperature-Controlled Microsensor Substrates



Kurt D. Benkstein, Baranidharan Raman, David L. Lahr, Stephen Semancik


Nanomaterials are becoming increasingly important for next-generation chemical sensing devices. In particular, quasi-one-dimensional materials, such as nanowires, are attracting a great deal of interest. While early examples of nano-wire-based chemical microsensors are showing promise, challenges remain for in-tegration, characterization and evaluation of nanowire-based devices. Here, a means to evaluate the performance of nanowire-based chemical microsensors is illustrated with two examples. Polycrystalline nanowire sensing materials are integrated with microsensor substrates that feature an embedded heater, facilitating the use of temperature to interrogate the sensing materials. By changing the oper-ating temperature, different effects are observed as a function of nanowire loading density (aligned tin oxide nanowires) or overall material morphology (tungsten oxide materials). Signal processing and data reduction approaches are used to better evaluate the high-density data obtained from the example microsensor devices. Using the examples, it is shown that using dynamic temperature approaches facilitates the evaluation of nanowire microsensors, and can even induce differences in sensing performance.
Metal Oxide Nanomaterials for Chemical Sensors
Publisher Info
Springer Science+Business Media, LLC, New York, NY


chemiresistor, microsensor, metal oxides, nanomaterials, signal processing


Benkstein, K. , Raman, B. , Lahr, D. and Semancik, S. (2012), Evaluation of Metal Oxide Nanowire Materials with Temperature-Controlled Microsensor Substrates, Metal Oxide Nanomaterials for Chemical Sensors, Springer Science+Business Media, LLC, New York, NY, [online], (Accessed July 24, 2024)


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Created November 30, 2012, Updated November 10, 2018